On-chip fabrication of ZnO-nanowire gas sensor with high gas sensitivity

M. W. Ahn, K. S. Park, J. H. Heo, D. W. Kim, K. J. Choi, J. G. Park

Research output: Contribution to journalArticle

258 Citations (Scopus)

Abstract

ZnO-nanowire gas sensors were fabricated by a selective growth of nanowires on patterned Au catalysts thus forming nanowire air bridges or 'nanobridges' between two Pt pillar electrodes. The gas sensing properties of nanobridge gas sensors were demonstrated using a diluted NO2. The response, as a function of temperature, was highest at 225 °C and was linearly increased with the concentration of NO2 in the range of 0.5-3 ppm and then showed a sign of saturation. Our sensor showed higher response compared with different types of sensors including ZnO nanocrystals, Sn- and In-doped ZnO thin film, or ZnO nanowires. The enhanced response was attributed to the additional modulation of the sensor resistance due to potential barrier at nanowire/nanowire junctions as well as the surface depletion region of each nanowire. Also nanobridge structure enabled fast recovery behavior because desorbed gas molecules can be easily swept away from the surface of ZnO nanowire without re-adsorption.

Original languageEnglish
Pages (from-to)168-173
Number of pages6
JournalSensors and Actuators, B: Chemical
Volume138
Issue number1
DOIs
Publication statusPublished - 2009 Apr 24
Externally publishedYes

Keywords

  • Gas sensor
  • NO
  • On-chip fabrication
  • ZnO nanowire

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Electrical and Electronic Engineering
  • Materials Chemistry

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