On the reduced electrical conductivity of radio-frequency sputtered doped ceria thin film by elevating the substrate temperature

Sanghoon Ji, Jihwan An, Dong Young Jang, Youngseok Jee, Joon Hyung Shim, Suk Won Cha

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The electrical conductivity of ∼200 nm-thick gadolinium-doped ceria (GDC) thin films deposited at various substrate temperatures by radio-frequency sputtering was evaluated in a temperature range of 400°C-550°C as an electrolyte for solid oxide fuel cells operated at low temperatures. Morphological, chemical, and crystalline properties were discussed to determine the electrical conductivity; in particular, the electrical conductivity of GDC thin film deposited at 300°C was appreciably lower than that of GDC thin film deposited at 150°C. The columnar grain boundaries and the reduced ceria formed during the sputtering process are considered as the major factors leading to the measured results.

Original languageEnglish
Pages (from-to)324-328
Number of pages5
JournalCurrent Applied Physics
Issue number3
Publication statusPublished - 2016 Mar 1



  • Electrical conductivity
  • Gadolinium-doped ceria
  • Radio frequency sputtering
  • Solid oxide fuel cell
  • Substrate temperature

ASJC Scopus subject areas

  • Materials Science(all)
  • Physics and Astronomy(all)

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