Optical characterization of BaSm2Ti4O12 thin films by spectroscopic ellipsometry

J. J. Yoon, S. Y. Hwang, Y. J. Kang, Y. D. Kim, Y. H. Jeong, S. Nahm

Research output: Contribution to journalArticle

1 Citation (Scopus)

Abstract

We performed spectroscopic ellipsometric measurement to characterize BaSm2Ti4O12 (BST) thin films grown on Pt/Ti/SiO2/c-Si substrate by rf magnetron sputtering. The six BST films were prepared at various deposition temperatures and thermal annealing times. The resulting refractive indices and extinction coefficients of the BST films show only slight change by the deposition temperature but a significant change after thermal annealing, implying the importance of the post annealing process. The increase of the refractive index can be understood by the higher density of the BST films caused by the crystallization after annealing process.

Original languageEnglish
Pages (from-to)3923-3926
Number of pages4
JournalThin Solid Films
Volume517
Issue number14
DOIs
Publication statusPublished - 2009 May 29

Keywords

  • BaSmTiO
  • Dielectric function
  • Ellipsometry

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry

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