Optical properties of BaSm2Ti4O12 thin films studied by using spectroscopic ellipsometry

J. J. Yoon, Y. W. Jung, S. Y. Hwang, Y. D. Kim, S. Nahm, Y. H. Jeong

Research output: Contribution to journalArticle

2 Citations (Scopus)

Abstract

A spectroscopic ellipsometry (SE) study was performed on BaSm 2Ti4O12 (BSmT) thin films grown on TiN/SiO 2/c-Si substrate grown by RF-magnetron sputtering. After deposition, the film was annealed at 400 °C under four different conditions of oxygen pressure. For the analysis of the measured spectra, a four-layer model containing a BSmT film was applied, where the optical property of the BSmT layer was represented by a Tauc-Lorentz dispersion function. Our analysis clearly showed that the refractive index and the extinction coefficient of the BSmT films changed consistently with oxygen pressure during the annealing procedure.

Original languageEnglish
Pages (from-to)1352-1356
Number of pages5
JournalJournal of the Korean Physical Society
Volume53
Issue number3
DOIs
Publication statusPublished - 2008 Sep

Keywords

  • BSmT
  • Dielectric function
  • Ellipsometry
  • Magnetron sputtering

ASJC Scopus subject areas

  • Physics and Astronomy(all)

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