Optical properties of bismuth niobate thin films studied by spectroscopic ellipsometry

Y. J. Kang, T. H. Ghong, Y. W. Jung, J. S. Byun, S. Kim, Y. D. Kim, T. G. Seong, K. H. Cho, S. Nahm

Research output: Contribution to journalArticle

6 Citations (Scopus)

Abstract

We performed optical analysis of bismuth niobate thin films using spectroscopic ellipsometry (SE). The films were grown on Pt/Ti/SiO 2/Si substrates with pulsed laser deposition. Six films were prepared using various deposition temperatures and thermal-annealing times. The room-temperature SE spectra of these films were measured by a rotating-analyzer ellipsometer from 1.12 to 6.52 eV at incidence angles of 50, 55, 60, 65, and 70°. The resulting refractive indices and extinction coefficients show significant changes with deposition temperature and thermal annealing.

Original languageEnglish
Pages (from-to)6526-6530
Number of pages5
JournalThin Solid Films
Volume518
Issue number22
DOIs
Publication statusPublished - 2010 Sep 1

Keywords

  • Busmuth neobate
  • Ellipsometry
  • Optical property

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry

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    Kang, Y. J., Ghong, T. H., Jung, Y. W., Byun, J. S., Kim, S., Kim, Y. D., Seong, T. G., Cho, K. H., & Nahm, S. (2010). Optical properties of bismuth niobate thin films studied by spectroscopic ellipsometry. Thin Solid Films, 518(22), 6526-6530. https://doi.org/10.1016/j.tsf.2010.01.053