Optical properties of boron carbide (B5C) thin films fabricated by plasma-enhanced chemical-vapor deposition

Ahmad A. Ahmad, N. J. Ianno, P. G. Snyder, D. Welipitiya, D. Byun, P. A. Dowben

Research output: Contribution to journalReview articlepeer-review

35 Citations (Scopus)

Abstract

Variable angle of incidence spectroscopic ellipsometry was used to determine the optical constants near the band edge of boron carbide (B5C) thin films deposited on glass and n-type Si(111) via plasma-enhanced chemical-vapor deposition. The index of refraction n, the extinction coefficient k, and the absorption coefficient are reported in the photon energy spectrum between 1.24 and 4 eV. Ellipsometry analysis of B5C films on silicon indicates a graded material, while the optical constants of B5C on glass are homogeneous. Line shape analyses of absorption data for the films on glass indicate an indirect transition at approximately 0.75 eV and a direct transition at about 1.5 eV.

Original languageEnglish
Pages (from-to)8643-8647
Number of pages5
JournalJournal of Applied Physics
Volume79
Issue number11
DOIs
Publication statusPublished - 1996 Jun 1
Externally publishedYes

ASJC Scopus subject areas

  • Physics and Astronomy(all)

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