Optical study of Mn-doped Bi 4Ti 3O 12 thin films by spectroscopic ellipsometry

Soon Yong Hwang; Tae Jung Kim; Jae Jin Yoon; Young Hun Cha; Young Dong Kim; Tae Geun Seong; Lee Seung Kang; Sahn Nahm

doi:10.1166/jnn.2011.3261

Optical study of Mn-doped Bi ₄Ti ₃O ₁₂ thin films by spectroscopic ellipsometry

Soon Yong Hwang, Tae Jung Kim, Jae Jin Yoon, Young Hun Cha, Young Dong Kim, Tae Geun Seong, Lee Seung Kang, Sahn Nahm

Department of Materials Science and Engineering

Research output: Contribution to journal › Article › peer-review

5 Citations (Scopus)

Abstract

Mn-doped Bi ₄Ti ₃O ₁₂(B ₄T ₃) thin films grown at 400 °C on a Pt/Ti/SiO2/Si substrate through pulsed laser deposition (PLD) were analyzed via spectroscopic ellipsometry (SE). The PLD targets were produced through the conventional solid-state sintering method, and the film samples were annealed at 600 °C. The SE spectra of B ₄T ₃ films were measured using a rotating analyzer type ellipsometer within the 1.12 to 6.52 eV energy range, with the various incidence angles. The optical properties of the B ₄T ₃ films with increasing Mn-mol concentration were extracted using a multilayer model for the whole structure and the Tauc-Lorentz (TL) dispersion relation for the B ₄T ₃ film layer. The analysis results clearly showed that the significant changes in optical properties of B ₄T ₃ films are caused by thermal annealing procedure and the Mn-mol concentrations. X-ray diffraction (XRD) measurement was also performed to confirm the results of SE analysis.

Original language	English
Pages (from-to)	884-888
Number of pages	5
Journal	Journal of Nanoscience and Nanotechnology
Volume	11
Issue number	1
DOIs	https://doi.org/10.1166/jnn.2011.3261
Publication status	Published - 2011 Jan

Keywords

Bi Ti O
Ellipsometry
Mn-doped
Tauc-Lorentz dispersion relation

ASJC Scopus subject areas

Bioengineering
Chemistry(all)
Biomedical Engineering
Materials Science(all)
Condensed Matter Physics

Access to Document

10.1166/jnn.2011.3261

Cite this

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title = "Optical study of Mn-doped Bi 4Ti 3O 12 thin films by spectroscopic ellipsometry",

abstract = "Mn-doped Bi 4Ti 3O 12(B 4T 3) thin films grown at 400 °C on a Pt/Ti/SiO2/Si substrate through pulsed laser deposition (PLD) were analyzed via spectroscopic ellipsometry (SE). The PLD targets were produced through the conventional solid-state sintering method, and the film samples were annealed at 600 °C. The SE spectra of B 4T 3 films were measured using a rotating analyzer type ellipsometer within the 1.12 to 6.52 eV energy range, with the various incidence angles. The optical properties of the B 4T 3 films with increasing Mn-mol concentration were extracted using a multilayer model for the whole structure and the Tauc-Lorentz (TL) dispersion relation for the B 4T 3 film layer. The analysis results clearly showed that the significant changes in optical properties of B 4T 3 films are caused by thermal annealing procedure and the Mn-mol concentrations. X-ray diffraction (XRD) measurement was also performed to confirm the results of SE analysis.",

keywords = "Bi Ti O, Ellipsometry, Mn-doped, Tauc-Lorentz dispersion relation",

author = "Hwang, {Soon Yong} and Kim, {Tae Jung} and Yoon, {Jae Jin} and Cha, {Young Hun} and Kim, {Young Dong} and Seong, {Tae Geun} and Kang, {Lee Seung} and Sahn Nahm",

year = "2011",

month = jan,

doi = "10.1166/jnn.2011.3261",

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T1 - Optical study of Mn-doped Bi 4Ti 3O 12 thin films by spectroscopic ellipsometry

AU - Hwang, Soon Yong

AU - Kim, Tae Jung

AU - Yoon, Jae Jin

AU - Cha, Young Hun

AU - Kim, Young Dong

AU - Seong, Tae Geun

AU - Kang, Lee Seung

AU - Nahm, Sahn

PY - 2011/1

Y1 - 2011/1

N2 - Mn-doped Bi 4Ti 3O 12(B 4T 3) thin films grown at 400 °C on a Pt/Ti/SiO2/Si substrate through pulsed laser deposition (PLD) were analyzed via spectroscopic ellipsometry (SE). The PLD targets were produced through the conventional solid-state sintering method, and the film samples were annealed at 600 °C. The SE spectra of B 4T 3 films were measured using a rotating analyzer type ellipsometer within the 1.12 to 6.52 eV energy range, with the various incidence angles. The optical properties of the B 4T 3 films with increasing Mn-mol concentration were extracted using a multilayer model for the whole structure and the Tauc-Lorentz (TL) dispersion relation for the B 4T 3 film layer. The analysis results clearly showed that the significant changes in optical properties of B 4T 3 films are caused by thermal annealing procedure and the Mn-mol concentrations. X-ray diffraction (XRD) measurement was also performed to confirm the results of SE analysis.

AB - Mn-doped Bi 4Ti 3O 12(B 4T 3) thin films grown at 400 °C on a Pt/Ti/SiO2/Si substrate through pulsed laser deposition (PLD) were analyzed via spectroscopic ellipsometry (SE). The PLD targets were produced through the conventional solid-state sintering method, and the film samples were annealed at 600 °C. The SE spectra of B 4T 3 films were measured using a rotating analyzer type ellipsometer within the 1.12 to 6.52 eV energy range, with the various incidence angles. The optical properties of the B 4T 3 films with increasing Mn-mol concentration were extracted using a multilayer model for the whole structure and the Tauc-Lorentz (TL) dispersion relation for the B 4T 3 film layer. The analysis results clearly showed that the significant changes in optical properties of B 4T 3 films are caused by thermal annealing procedure and the Mn-mol concentrations. X-ray diffraction (XRD) measurement was also performed to confirm the results of SE analysis.

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KW - Ellipsometry

KW - Mn-doped

KW - Tauc-Lorentz dispersion relation

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