Optically Patternable Metamaterial below Diffraction Limit

Youngseop Lee, Sang Gil Park, Seokjae Yoo, Minhee Kang, Sang Chul Jeon, Young Su Kim, Q Han Park, Ki Hun Jeong

Research output: Contribution to journalArticle

2 Citations (Scopus)

Abstract

We report an optically patternable metamaterial (OPM) for ultraviolet nanolithography below the diffraction limit. The OPM features monolayered silver nanoislands embedded within a photosensitive polymer by using spin-coating of an ultrathin polymer, oblique angle deposition, and solid-state embedment of silver nanoislands. This unique configuration simultaneously exhibits both negative effective permittivity and high image contrast in the ultraviolet range, which enables the surface plasmon excitation for the clear photolithographic definition of minimum feature size of 70 nm (≲ λ/5) beyond the near-field zone. This new metamaterial provides a new class of photoresist for ultraviolet nanolithography below the diffraction limit.

Original languageEnglish
Pages (from-to)18405-18409
Number of pages5
JournalACS Applied Materials and Interfaces
Volume9
Issue number22
DOIs
Publication statusPublished - 2017 Jun 7

Keywords

  • meta-photoresist
  • subdiffraction limit
  • superlens effect
  • surface plasmon excitation
  • ultraviolet nanolithography

ASJC Scopus subject areas

  • Materials Science(all)

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  • Cite this

    Lee, Y., Park, S. G., Yoo, S., Kang, M., Jeon, S. C., Kim, Y. S., Park, Q. H., & Jeong, K. H. (2017). Optically Patternable Metamaterial below Diffraction Limit. ACS Applied Materials and Interfaces, 9(22), 18405-18409. https://doi.org/10.1021/acsami.7b02940