Optimal iterative learning control of wafer temperature uniformity in rapid thermal processing

Kwang S. Lee, Hyojin Ahn, In Sik Chin, Jay H. Lee, Dae R. Yang

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Optimal iterative learning control of wafer temperature uniformity in rapid thermal processing'. Together they form a unique fingerprint.

Engineering & Materials Science