The influence of intermediate layer characteristics on the structural and magnetic properties of CoCr-based perpendicular media has been investigated. CoCrPt-SiO2 stacks were deposited on a 2.5-inch glass substrates. To improve intermediate layer properties without noticeable sacrifice of magnetic and structural properties of recording layer, the conditions of intermediate layer deposition were varied. The recording layer was deposited on the Ru intermediate layer in 20 mTorr Ar pressure to increase coercivity. As a result, coercivity is increased from 2.2 to 3.7 kOe because the interface between Ru intermediate layer and recording layer was rougher than the interface formed at low Ar pressure. Additionally, to increase perpendicular anisotropy of recording layer, the Ru sputtering temperature condition was varied, ranging from 150°C to 300°C. However, the perpendicular anisotropy of recording layer was decreased.
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics