Oxygen plasma effects on sol-gel-derived lead-zirconate-titanate thin films

H. K. Jang, S. K. Lee, Cheol Eui Lee, S. J. Noh, W. I. Lee

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Abstract

We studied effects of oxygen plasma treatment on the ferroelectric Pb(Zr x,Ti 1-x)O 3 (PZT) films prepared by a sol-gel method. Electrical characteristics of the films were found to be improved considerably by exposure to the O 2 plasma, with enhanced remanent polarization and decreased leakage current densities. Chemical bonding analysis by means of x-ray photoelectron spectroscopy in the Pb 4f region indicated that the intensity from the perovskite PZT phase increased considerably after the O 2 plasma treatment, giving rise to the improved performances of the PZT films.

Original languageEnglish
Pages (from-to)882-884
Number of pages3
JournalApplied Physics Letters
Volume76
Issue number7
Publication statusPublished - 2000 Feb 14

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ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

Cite this

Jang, H. K., Lee, S. K., Lee, C. E., Noh, S. J., & Lee, W. I. (2000). Oxygen plasma effects on sol-gel-derived lead-zirconate-titanate thin films. Applied Physics Letters, 76(7), 882-884.