We studied effects of oxygen plasma treatment on the ferroelectric Pb(Zr x,Ti 1-x)O 3 (PZT) films prepared by a sol-gel method. Electrical characteristics of the films were found to be improved considerably by exposure to the O 2 plasma, with enhanced remanent polarization and decreased leakage current densities. Chemical bonding analysis by means of x-ray photoelectron spectroscopy in the Pb 4f region indicated that the intensity from the perovskite PZT phase increased considerably after the O 2 plasma treatment, giving rise to the improved performances of the PZT films.
|Number of pages||3|
|Journal||Applied Physics Letters|
|Publication status||Published - 2000 Feb 14|
ASJC Scopus subject areas
- Physics and Astronomy (miscellaneous)