Oxygen plasma effects on sol-gel-derived lead-zirconate-titanate thin films

H. K. Jang, S. K. Lee, Cheol Eui Lee, S. J. Noh, W. I. Lee

Research output: Contribution to journalArticle

25 Citations (Scopus)

Abstract

We studied effects of oxygen plasma treatment on the ferroelectric Pb(Zrx,Ti1-x)O3 (PZT) films prepared by a sol-gel method. Electrical characteristics of the films were found to be improved considerably by exposure to the O2 plasma, with enhanced remanent polarization and decreased leakage current densities. Chemical bonding analysis by means of x-ray photoelectron spectroscopy in the Pb 4f region indicated that the intensity from the perovskite PZT phase increased considerably after the O2 plasma treatment, giving rise to the improved performances of the PZT films.

Original languageEnglish
Pages (from-to)882-884
Number of pages3
JournalApplied Physics Letters
Volume76
Issue number7
DOIs
Publication statusPublished - 2000 Feb 14

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

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