Oxygen-plasma treatment of sol-gel derived lead zirconate titanate thin films

Cheol Eui Lee, H. K. Jang, E. R. Park, E. K. Kang, S. K. Lee, S. J. Noh

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

Oxygen-plasma treatment has been introduced for improving electrical characteristics and low-temperature processing of sol-gel derived Pb(Zr x , Ti l - x )O 3 (PZT) thin films. The ferroelectric PZT films with room temperature oxygen-plasma treatment showed enhanced polarization and decreased leakage current densities, as well as much reduced electrical fatigues. Besides, oxygen-plasma treatment at 200C, following a low-temperature annealing in oxygen at 450C, gave rise to ferroelectric hysteresis loops, which was explained by the perovskite phase formation starting from the surface layers.

Original languageEnglish
Title of host publicationFerroelectrics
Pages123-128
Number of pages6
Volume269
DOIs
Publication statusPublished - 2002 Jan 1

Keywords

  • Fatigue
  • Low-temperature processing
  • Oxygen-plasma
  • PZT
  • Thin films

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Electronic, Optical and Magnetic Materials

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    Lee, C. E., Jang, H. K., Park, E. R., Kang, E. K., Lee, S. K., & Noh, S. J. (2002). Oxygen-plasma treatment of sol-gel derived lead zirconate titanate thin films. In Ferroelectrics (Vol. 269, pp. 123-128) https://doi.org/10.1080/00150190211139