Palladium nanogap-based H<inf>2</inf> sensors on a patterned elastomeric substrate using nanoimprint lithography

Byungjin Jang, Sungmee Cho, Cheolmin Park, Heon Lee, Min Jung Song, Wooyoung Lee

Research output: Contribution to journalArticle

10 Citations (Scopus)

Abstract

Here we report a new nanogap formation manner at edges of a palladium (Pd) thin film on highly patterned arrays of an elastomeric PDMS substrate fabricated nanoimprint lithography (NIL) by absorption/desorption cycles of H<inf>2</inf> for use in the detection of hydrogen (H<inf>2</inf>) gas. A 10-nm-thick Pd layer was deposited on the patterned PDMS substrate using an ultra-high vacuum DC magnetron sputtering system. The Pd nanogaps (∼100 nm (W)) formed on the edges of the grating structure by expansion and contraction of the film through a few cycles of H<inf>2</inf> absorption and desorption. Such nanogaps are crucial to the performance of the sensors. The H<inf>2</inf> sensors were found to exhibit a fast response time (∼1 s), low detection limit (0.1%), wide linear range (0.1-2%), and an ON-OFF switching operation in air. These properties are attributed to the synergistic combination of nanogap break junction control in Pd and the patterned elastomeric substrate.

Original languageEnglish
Pages (from-to)593-598
Number of pages6
JournalSensors and Actuators, B: Chemical
Volume221
DOIs
Publication statusPublished - 2015 Jul 20

Keywords

  • Hydrogen sensors
  • Nanogap
  • Palladium (Pd)
  • Poly(dimethylsiloxane) (PDMS)

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Condensed Matter Physics
  • Electronic, Optical and Magnetic Materials
  • Metals and Alloys
  • Surfaces, Coatings and Films
  • Materials Chemistry
  • Instrumentation

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