Palladium nanogap-based H<inf>2</inf> sensors on a patterned elastomeric substrate using nanoimprint lithography

Byungjin Jang, Sungmee Cho, Cheolmin Park, Heon Lee, Min Jung Song, Wooyoung Lee

Research output: Contribution to journalArticle

10 Citations (Scopus)

Abstract

Here we report a new nanogap formation manner at edges of a palladium (Pd) thin film on highly patterned arrays of an elastomeric PDMS substrate fabricated nanoimprint lithography (NIL) by absorption/desorption cycles of H<inf>2</inf> for use in the detection of hydrogen (H<inf>2</inf>) gas. A 10-nm-thick Pd layer was deposited on the patterned PDMS substrate using an ultra-high vacuum DC magnetron sputtering system. The Pd nanogaps (∼100 nm (W)) formed on the edges of the grating structure by expansion and contraction of the film through a few cycles of H<inf>2</inf> absorption and desorption. Such nanogaps are crucial to the performance of the sensors. The H<inf>2</inf> sensors were found to exhibit a fast response time (∼1 s), low detection limit (0.1%), wide linear range (0.1-2%), and an ON-OFF switching operation in air. These properties are attributed to the synergistic combination of nanogap break junction control in Pd and the patterned elastomeric substrate.

Original languageEnglish
Pages (from-to)593-598
Number of pages6
JournalSensors and Actuators, B: Chemical
Volume221
DOIs
Publication statusPublished - 2015 Jul 20

Fingerprint

Nanoimprint lithography
Palladium
palladium
lithography
sensors
Sensors
Substrates
Desorption
desorption
cycles
Ultrahigh vacuum
Magnetron sputtering
ultrahigh vacuum
contraction
Hydrogen
magnetron sputtering
Gases
direct current
gratings
Thin films

Keywords

  • Hydrogen sensors
  • Nanogap
  • Palladium (Pd)
  • Poly(dimethylsiloxane) (PDMS)

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Condensed Matter Physics
  • Electronic, Optical and Magnetic Materials
  • Metals and Alloys
  • Surfaces, Coatings and Films
  • Materials Chemistry
  • Instrumentation

Cite this

Palladium nanogap-based H<inf>2</inf> sensors on a patterned elastomeric substrate using nanoimprint lithography. / Jang, Byungjin; Cho, Sungmee; Park, Cheolmin; Lee, Heon; Song, Min Jung; Lee, Wooyoung.

In: Sensors and Actuators, B: Chemical, Vol. 221, 20.07.2015, p. 593-598.

Research output: Contribution to journalArticle

Jang, Byungjin ; Cho, Sungmee ; Park, Cheolmin ; Lee, Heon ; Song, Min Jung ; Lee, Wooyoung. / Palladium nanogap-based H<inf>2</inf> sensors on a patterned elastomeric substrate using nanoimprint lithography. In: Sensors and Actuators, B: Chemical. 2015 ; Vol. 221. pp. 593-598.
@article{aa4f0917ccdb48e7ad7d7953a91a3b23,
title = "Palladium nanogap-based H2 sensors on a patterned elastomeric substrate using nanoimprint lithography",
abstract = "Here we report a new nanogap formation manner at edges of a palladium (Pd) thin film on highly patterned arrays of an elastomeric PDMS substrate fabricated nanoimprint lithography (NIL) by absorption/desorption cycles of H2 for use in the detection of hydrogen (H2) gas. A 10-nm-thick Pd layer was deposited on the patterned PDMS substrate using an ultra-high vacuum DC magnetron sputtering system. The Pd nanogaps (∼100 nm (W)) formed on the edges of the grating structure by expansion and contraction of the film through a few cycles of H2 absorption and desorption. Such nanogaps are crucial to the performance of the sensors. The H2 sensors were found to exhibit a fast response time (∼1 s), low detection limit (0.1{\%}), wide linear range (0.1-2{\%}), and an ON-OFF switching operation in air. These properties are attributed to the synergistic combination of nanogap break junction control in Pd and the patterned elastomeric substrate.",
keywords = "Hydrogen sensors, Nanogap, Palladium (Pd), Poly(dimethylsiloxane) (PDMS)",
author = "Byungjin Jang and Sungmee Cho and Cheolmin Park and Heon Lee and Song, {Min Jung} and Wooyoung Lee",
year = "2015",
month = "7",
day = "20",
doi = "10.1016/j.snb.2015.06.142",
language = "English",
volume = "221",
pages = "593--598",
journal = "Sensors and Actuators, B: Chemical",
issn = "0925-4005",
publisher = "Elsevier",

}

TY - JOUR

T1 - Palladium nanogap-based H2 sensors on a patterned elastomeric substrate using nanoimprint lithography

AU - Jang, Byungjin

AU - Cho, Sungmee

AU - Park, Cheolmin

AU - Lee, Heon

AU - Song, Min Jung

AU - Lee, Wooyoung

PY - 2015/7/20

Y1 - 2015/7/20

N2 - Here we report a new nanogap formation manner at edges of a palladium (Pd) thin film on highly patterned arrays of an elastomeric PDMS substrate fabricated nanoimprint lithography (NIL) by absorption/desorption cycles of H2 for use in the detection of hydrogen (H2) gas. A 10-nm-thick Pd layer was deposited on the patterned PDMS substrate using an ultra-high vacuum DC magnetron sputtering system. The Pd nanogaps (∼100 nm (W)) formed on the edges of the grating structure by expansion and contraction of the film through a few cycles of H2 absorption and desorption. Such nanogaps are crucial to the performance of the sensors. The H2 sensors were found to exhibit a fast response time (∼1 s), low detection limit (0.1%), wide linear range (0.1-2%), and an ON-OFF switching operation in air. These properties are attributed to the synergistic combination of nanogap break junction control in Pd and the patterned elastomeric substrate.

AB - Here we report a new nanogap formation manner at edges of a palladium (Pd) thin film on highly patterned arrays of an elastomeric PDMS substrate fabricated nanoimprint lithography (NIL) by absorption/desorption cycles of H2 for use in the detection of hydrogen (H2) gas. A 10-nm-thick Pd layer was deposited on the patterned PDMS substrate using an ultra-high vacuum DC magnetron sputtering system. The Pd nanogaps (∼100 nm (W)) formed on the edges of the grating structure by expansion and contraction of the film through a few cycles of H2 absorption and desorption. Such nanogaps are crucial to the performance of the sensors. The H2 sensors were found to exhibit a fast response time (∼1 s), low detection limit (0.1%), wide linear range (0.1-2%), and an ON-OFF switching operation in air. These properties are attributed to the synergistic combination of nanogap break junction control in Pd and the patterned elastomeric substrate.

KW - Hydrogen sensors

KW - Nanogap

KW - Palladium (Pd)

KW - Poly(dimethylsiloxane) (PDMS)

UR - http://www.scopus.com/inward/record.url?scp=84937576946&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84937576946&partnerID=8YFLogxK

U2 - 10.1016/j.snb.2015.06.142

DO - 10.1016/j.snb.2015.06.142

M3 - Article

AN - SCOPUS:84937576946

VL - 221

SP - 593

EP - 598

JO - Sensors and Actuators, B: Chemical

JF - Sensors and Actuators, B: Chemical

SN - 0925-4005

ER -