Patterned multiwall carbon nanotube films as materials of NO2 gas sensors

Woo Sung Cho, Seung Il Moon, Kyeong Kap Paek, Yun-Hi Lee, Jung ho Park, Byeong Kwon Ju

Research output: Contribution to journalArticle

60 Citations (Scopus)

Abstract

Multiwall carbon nanotube (MWNT) films grown by thermal chemical vapor deposition on a micromachined substrate with a chrome heater and a diaphragm have been investigated as sensing materials of resistive gas sensors for nitrogen dioxide (NO2). We fabricated the aligned MWNT films, which grew into mesh and serpentine shapes by photolithography. Photolithography patterned the cobalt catalyst layer. MWNT films showed a p-type electrical resistivity with decreasing electrical resistance upon exposure to NO2. The sensor exhibited a reversible response at a thermal treatment temperature of 130 °C for a time constant of a few minutes. The resistance change to NO2 of the mesh-shaped MWNT films was found to be larger than that of the serpentine-shaped MWNT films.

Original languageEnglish
Pages (from-to)180-185
Number of pages6
JournalSensors and Actuators, B: Chemical
Volume119
Issue number1
DOIs
Publication statusPublished - 2006 Nov 24

Fingerprint

Carbon Nanotubes
Chemical sensors
Carbon nanotubes
carbon nanotubes
sensors
gases
Photolithography
photolithography
mesh
Nitrogen Dioxide
nitrogen dioxide
Acoustic impedance
diaphragms
Diaphragms
Cobalt
electrical resistance
heaters
time constant
Chemical vapor deposition
chromium

Keywords

  • Diaphragm
  • Multiwall carbon nanotubes
  • Nitrogen dioxide (NO)
  • Resistive gas sensor
  • Reversible response
  • Thermal chemical vapor deposition (CVD)

ASJC Scopus subject areas

  • Analytical Chemistry
  • Electrochemistry
  • Electrical and Electronic Engineering

Cite this

Patterned multiwall carbon nanotube films as materials of NO2 gas sensors. / Cho, Woo Sung; Moon, Seung Il; Paek, Kyeong Kap; Lee, Yun-Hi; Park, Jung ho; Ju, Byeong Kwon.

In: Sensors and Actuators, B: Chemical, Vol. 119, No. 1, 24.11.2006, p. 180-185.

Research output: Contribution to journalArticle

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