Patterned multiwall carbon nanotube films as materials of NO2 gas sensors

Woo Sung Cho, Seung Il Moon, Kyeong Kap Paek, Yun Hi Lee, Jung Ho Park, Byeong Kwon Ju

Research output: Contribution to journalArticlepeer-review

68 Citations (Scopus)


Multiwall carbon nanotube (MWNT) films grown by thermal chemical vapor deposition on a micromachined substrate with a chrome heater and a diaphragm have been investigated as sensing materials of resistive gas sensors for nitrogen dioxide (NO2). We fabricated the aligned MWNT films, which grew into mesh and serpentine shapes by photolithography. Photolithography patterned the cobalt catalyst layer. MWNT films showed a p-type electrical resistivity with decreasing electrical resistance upon exposure to NO2. The sensor exhibited a reversible response at a thermal treatment temperature of 130 °C for a time constant of a few minutes. The resistance change to NO2 of the mesh-shaped MWNT films was found to be larger than that of the serpentine-shaped MWNT films.

Original languageEnglish
Pages (from-to)180-185
Number of pages6
JournalSensors and Actuators, B: Chemical
Issue number1
Publication statusPublished - 2006 Nov 24


  • Diaphragm
  • Multiwall carbon nanotubes
  • Nitrogen dioxide (NO)
  • Resistive gas sensor
  • Reversible response
  • Thermal chemical vapor deposition (CVD)

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Electrical and Electronic Engineering
  • Materials Chemistry


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