Abstract
We fabricated Ga2O3-based transparent conductive electrodes (TCEs) for use in near-ultraviolet (NUV) lightemitting diodes (LEDs) by embedding metal layers into Ga2O3. We employ Ni and Ag layers to improve current injection and spreading properties. Our fabricated Ni/Ga2O3/Ag/Ga2O3 multilayer (annealed at 600 °C, 1 min) deposited on an NUV LED wafer exhibits 83% transmittance at 385 nm with a specific contact resistance of 8 × 10-3 Ω • cm2. An NUV LED fabricated with a Ni/Ga2O3/Ag/Ga2O3 TCE exhibits a 17% increase in light output power at 150 mA and a 3.2% decrease in forward voltage at 20 mA over those of an indium tin oxide NUV LED.
Original language | English |
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Pages (from-to) | 67-70 |
Number of pages | 4 |
Journal | IEEE Photonics Technology Letters |
Volume | 28 |
Issue number | 1 |
DOIs | |
Publication status | Published - 2015 Sept 22 |
Keywords
- Gallium nitride
- Transparent conductive electrode
- Ultraviolet light-emitting diode
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Atomic and Molecular Physics, and Optics
- Electrical and Electronic Engineering