Period-chirped gratings fabricated by laser interference lithography with a concave Lloyd's mirror

Hanbit Kim, Hyunho Jung, Dong Hyun Lee, Kyu Back Lee, Heonsu Jeon

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15 Citations (Scopus)

Abstract

We developed a laser interference lithography (LIL) system for fabrication of period-chirped gratings, which would be useful for sophisticated optical components. Despite its simplicity, the developed LIL system, based on a Lloyd's mirror interferometer with a cylindrically concave mirror, can generate chirped gratings, yet over a large area at high throughput owing to the nature of LIL. We have derived exact theoretical equations needed for system design, built the LIL system, and subsequently realized period-chirped gratings. A fabricated sample whose center period is Λ ≈ 600 nm exhibits a continuous period variation of ΔΛ = 92 nm across 17 mm width.

Original languageEnglish
Pages (from-to)354-359
Number of pages6
JournalApplied Optics
Volume55
Issue number2
DOIs
Publication statusPublished - 2016 Jan 10

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ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics

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