Period-chirped gratings fabricated by laser interference lithography with a concave Lloyd's mirror

Hanbit Kim, Hyunho Jung, Dong Hyun Lee, Kyu Back Lee, Heonsu Jeon

Research output: Contribution to journalArticle

15 Citations (Scopus)

Abstract

We developed a laser interference lithography (LIL) system for fabrication of period-chirped gratings, which would be useful for sophisticated optical components. Despite its simplicity, the developed LIL system, based on a Lloyd's mirror interferometer with a cylindrically concave mirror, can generate chirped gratings, yet over a large area at high throughput owing to the nature of LIL. We have derived exact theoretical equations needed for system design, built the LIL system, and subsequently realized period-chirped gratings. A fabricated sample whose center period is Λ ≈ 600 nm exhibits a continuous period variation of ΔΛ = 92 nm across 17 mm width.

Original languageEnglish
Pages (from-to)354-359
Number of pages6
JournalApplied Optics
Volume55
Issue number2
DOIs
Publication statusPublished - 2016 Jan 10

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lithography
gratings
mirrors
interference
lasers
systems engineering
interferometers
fabrication

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics

Cite this

Period-chirped gratings fabricated by laser interference lithography with a concave Lloyd's mirror. / Kim, Hanbit; Jung, Hyunho; Lee, Dong Hyun; Lee, Kyu Back; Jeon, Heonsu.

In: Applied Optics, Vol. 55, No. 2, 10.01.2016, p. 354-359.

Research output: Contribution to journalArticle

Kim, Hanbit ; Jung, Hyunho ; Lee, Dong Hyun ; Lee, Kyu Back ; Jeon, Heonsu. / Period-chirped gratings fabricated by laser interference lithography with a concave Lloyd's mirror. In: Applied Optics. 2016 ; Vol. 55, No. 2. pp. 354-359.
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