Permeability enhancement in Fe/CoNbZr multilayers prepared by Ar/H2 mixed gas sputtering and heat treatment

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Abstract

Effects of layer thickness, deposition and annealing conditions on the magnetic properties of Fe/CoNbZr multilayers were investigated. When the multilayer comprising (Fe 40 nm/CoNbZr 10 nm) × 10 was deposited under Ar 80%/H2 20% (by volume), an increase in high frequency (100 MHz) permeability was observed (2300 from pure Ar deposition vs. 2900 from mixed gas deposition). Ar/H2 mixed gas sputtering is believed to promote interface smoothness. Furthermore, when the same sample was annealed at 300°C for 30 min in a vacuum, we obtained even higher permeability reaching 3900 accompanying lower coercivity. Based upon X-ray diffraction analyses, annealing appeared to reduce residual stresses resulting in enhanced magnetic softness.

Original languageEnglish
JournalJournal of Magnetism and Magnetic Materials
Volume233
Issue number3
Publication statusPublished - 2001 Aug 1

Fingerprint

Sputtering
permeability
Multilayers
heat treatment
Gases
sputtering
Heat treatment
augmentation
gases
Annealing
softness
annealing
Coercive force
residual stress
coercivity
Residual stresses
Magnetic properties
Vacuum
magnetic properties
X ray diffraction

Keywords

  • Heat treatment
  • Magnetic multilayers
  • Permeability
  • Soft magnetic properties
  • Sputtering

ASJC Scopus subject areas

  • Condensed Matter Physics

Cite this

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title = "Permeability enhancement in Fe/CoNbZr multilayers prepared by Ar/H2 mixed gas sputtering and heat treatment",
abstract = "Effects of layer thickness, deposition and annealing conditions on the magnetic properties of Fe/CoNbZr multilayers were investigated. When the multilayer comprising (Fe 40 nm/CoNbZr 10 nm) × 10 was deposited under Ar 80{\%}/H2 20{\%} (by volume), an increase in high frequency (100 MHz) permeability was observed (2300 from pure Ar deposition vs. 2900 from mixed gas deposition). Ar/H2 mixed gas sputtering is believed to promote interface smoothness. Furthermore, when the same sample was annealed at 300°C for 30 min in a vacuum, we obtained even higher permeability reaching 3900 accompanying lower coercivity. Based upon X-ray diffraction analyses, annealing appeared to reduce residual stresses resulting in enhanced magnetic softness.",
keywords = "Heat treatment, Magnetic multilayers, Permeability, Soft magnetic properties, Sputtering",
author = "Kim, {Eun Hahk} and Young-geun Kim and Lee, {Seong Rae}",
year = "2001",
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language = "English",
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journal = "Journal of Magnetism and Magnetic Materials",
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T1 - Permeability enhancement in Fe/CoNbZr multilayers prepared by Ar/H2 mixed gas sputtering and heat treatment

AU - Kim, Eun Hahk

AU - Kim, Young-geun

AU - Lee, Seong Rae

PY - 2001/8/1

Y1 - 2001/8/1

N2 - Effects of layer thickness, deposition and annealing conditions on the magnetic properties of Fe/CoNbZr multilayers were investigated. When the multilayer comprising (Fe 40 nm/CoNbZr 10 nm) × 10 was deposited under Ar 80%/H2 20% (by volume), an increase in high frequency (100 MHz) permeability was observed (2300 from pure Ar deposition vs. 2900 from mixed gas deposition). Ar/H2 mixed gas sputtering is believed to promote interface smoothness. Furthermore, when the same sample was annealed at 300°C for 30 min in a vacuum, we obtained even higher permeability reaching 3900 accompanying lower coercivity. Based upon X-ray diffraction analyses, annealing appeared to reduce residual stresses resulting in enhanced magnetic softness.

AB - Effects of layer thickness, deposition and annealing conditions on the magnetic properties of Fe/CoNbZr multilayers were investigated. When the multilayer comprising (Fe 40 nm/CoNbZr 10 nm) × 10 was deposited under Ar 80%/H2 20% (by volume), an increase in high frequency (100 MHz) permeability was observed (2300 from pure Ar deposition vs. 2900 from mixed gas deposition). Ar/H2 mixed gas sputtering is believed to promote interface smoothness. Furthermore, when the same sample was annealed at 300°C for 30 min in a vacuum, we obtained even higher permeability reaching 3900 accompanying lower coercivity. Based upon X-ray diffraction analyses, annealing appeared to reduce residual stresses resulting in enhanced magnetic softness.

KW - Heat treatment

KW - Magnetic multilayers

KW - Permeability

KW - Soft magnetic properties

KW - Sputtering

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VL - 233

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