Permeability enhancement in Fe/CoNbZr multilayers prepared by Ar/H2 mixed gas sputtering and heat treatment

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Abstract

Effects of layer thickness, deposition and annealing conditions on the magnetic properties of Fe/CoNbZr multilayers were investigated. When the multilayer comprising (Fe 40 nm/CoNbZr 10 nm) × 10 was deposited under Ar 80%/H2 20% (by volume), an increase in high frequency (100 MHz) permeability was observed (2300 from pure Ar deposition vs. 2900 from mixed gas deposition). Ar/H2 mixed gas sputtering is believed to promote interface smoothness. Furthermore, when the same sample was annealed at 300°C for 30 min in a vacuum, we obtained even higher permeability reaching 3900 accompanying lower coercivity. Based upon X-ray diffraction analyses, annealing appeared to reduce residual stresses resulting in enhanced magnetic softness.

Original languageEnglish
Pages (from-to)142-146
Number of pages5
JournalJournal of Magnetism and Magnetic Materials
Volume233
Issue number3
Publication statusPublished - 2001 Aug

Keywords

  • Heat treatment
  • Magnetic multilayers
  • Permeability
  • Soft magnetic properties
  • Sputtering

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics

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