Phonon conduction in silicon nanobeams

Woosung Park, Dongsuk D. Shin, Soo Jin Kim, Joseph S. Katz, Joonsuk Park, Chae Hyuck Ahn, Takashi Kodama, Mehdi Asheghi, Thomas W. Kenny, Kenneth E. Goodson

Research output: Contribution to journalArticle

9 Citations (Scopus)

Abstract

Despite extensive studies on thermal transport in thin silicon films, there has been little work studying the thermal conductivity of single-crystal rectangular, cross-sectional nanobeams that are commonly used in many applications such as nanoelectronics (FinFETs), nano-electromechanical systems, and nanophotonics. Here, we report experimental data on the thermal conductivity of silicon nanobeams of a thickness of ∼78 nm and widths of ∼65 nm, 170 nm, 270 nm, 470 nm, and 970 nm. The experimental data agree well (within ∼9%) with the predictions of a thermal conductivity model that uses a combination of bulk mean free paths obtained from ab initio calculations and a suppression function derived from the kinetic theory. This work quantifies the impact of nanobeam aspect ratios on thermal transport and establishes a criterion to differentiate between thin films and beams in studying thermal transport. The thermal conductivity of a 78 nm × 65 nm nanobeam is ∼32 W m -1 K -1 , which is roughly a factor of two smaller than that of a 78 nm thick film.

Original languageEnglish
Article number213102
JournalApplied Physics Letters
Volume110
Issue number21
DOIs
Publication statusPublished - 2017 May 22
Externally publishedYes

Fingerprint

thermal conductivity
conduction
silicon
silicon films
kinetic theory
mean free path
thick films
aspect ratio
retarding
single crystals
thin films
predictions

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

Cite this

Park, W., Shin, D. D., Kim, S. J., Katz, J. S., Park, J., Ahn, C. H., ... Goodson, K. E. (2017). Phonon conduction in silicon nanobeams. Applied Physics Letters, 110(21), [213102]. https://doi.org/10.1063/1.4983790

Phonon conduction in silicon nanobeams. / Park, Woosung; Shin, Dongsuk D.; Kim, Soo Jin; Katz, Joseph S.; Park, Joonsuk; Ahn, Chae Hyuck; Kodama, Takashi; Asheghi, Mehdi; Kenny, Thomas W.; Goodson, Kenneth E.

In: Applied Physics Letters, Vol. 110, No. 21, 213102, 22.05.2017.

Research output: Contribution to journalArticle

Park, W, Shin, DD, Kim, SJ, Katz, JS, Park, J, Ahn, CH, Kodama, T, Asheghi, M, Kenny, TW & Goodson, KE 2017, 'Phonon conduction in silicon nanobeams', Applied Physics Letters, vol. 110, no. 21, 213102. https://doi.org/10.1063/1.4983790
Park W, Shin DD, Kim SJ, Katz JS, Park J, Ahn CH et al. Phonon conduction in silicon nanobeams. Applied Physics Letters. 2017 May 22;110(21). 213102. https://doi.org/10.1063/1.4983790
Park, Woosung ; Shin, Dongsuk D. ; Kim, Soo Jin ; Katz, Joseph S. ; Park, Joonsuk ; Ahn, Chae Hyuck ; Kodama, Takashi ; Asheghi, Mehdi ; Kenny, Thomas W. ; Goodson, Kenneth E. / Phonon conduction in silicon nanobeams. In: Applied Physics Letters. 2017 ; Vol. 110, No. 21.
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