Photo-assisted direct writing of conducting aluminum

Seong Don Hwang, Dong Jin Byun, J. A. Glass, Brian Robertson, J. T. Spencer, S. Datta, P. A. Dowben

Research output: Contribution to journal › Article

3 Citations (Scopus)

Abstract

We have succeeded in selective area deposition of aluminum films by ultraviolet photolytic decomposition of the organometallic complex trimethylamine alane, TMAA-AlH3(N(CH3)3)2. Both ultraviolet and visible light successfully photolysed the alane adduct and resulted in selective area deposition. The light sources exhibited different laser fragmentation mass spectra, suggesting somewhat different decomposition pathways.

Original languageEnglish
JournalMaterials Science and Engineering B
Volume30
Issue number1
Publication statusPublished - 1995 Feb 1
Externally publishedYes

Fingerprint

Aluminum
Decomposition
aluminum
decomposition
conduction
Organometallics
ultraviolet radiation
mass spectra
adducts
Light sources
light sources
fragmentation
Lasers
lasers
trimethylamine

Keywords

  • Aluminium
  • Chemical vapor deposition
  • TMAA: Photolysis

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Materials Science(all)
  • Mechanics of Materials
  • Mechanical Engineering
  • Electronic, Optical and Magnetic Materials

Cite this

Hwang, S. D., Byun, D. J., Glass, J. A., Robertson, B., Spencer, J. T., Datta, S., & Dowben, P. A. (1995). Photo-assisted direct writing of conducting aluminum. Materials Science and Engineering B, 30(1).

Photo-assisted direct writing of conducting aluminum. / Hwang, Seong Don; Byun, Dong Jin; Glass, J. A.; Robertson, Brian; Spencer, J. T.; Datta, S.; Dowben, P. A.

In: Materials Science and Engineering B, Vol. 30, No. 1, 01.02.1995.

Research output: Contribution to journal › Article

Hwang, SD, Byun, DJ, Glass, JA, Robertson, B, Spencer, JT, Datta, S & Dowben, PA 1995, 'Photo-assisted direct writing of conducting aluminum', Materials Science and Engineering B, vol. 30, no. 1.
Hwang SD, Byun DJ, Glass JA, Robertson B, Spencer JT, Datta S et al. Photo-assisted direct writing of conducting aluminum. Materials Science and Engineering B. 1995 Feb 1;30(1).
Hwang, Seong Don ; Byun, Dong Jin ; Glass, J. A. ; Robertson, Brian ; Spencer, J. T. ; Datta, S. ; Dowben, P. A. / Photo-assisted direct writing of conducting aluminum. In: Materials Science and Engineering B. 1995 ; Vol. 30, No. 1.
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