Physical properties of crystalline NaNbO3 thin film grown on Sr2Nb3O10 nanosheets at low temperatures for piezoelectric energy harvesters

Jong Un Woo, In Su Kim, Bumjoo Kim, Sahn Nahm

Research output: Contribution to journalArticlepeer-review

Abstract

A Sr2Nb3O10 (SN) monolayer deposited on Pt/SiO2/Si (PSS) was employed as the template for the growth of crystalline NaNbO3 (NNO) thin films at low temperatures. The [0 0 1]-oriented crystalline NNO film was effectively grown on SN/PSS at 250 °C. This NNO film showed a small εr of 115, along with good insulating properties with a low leakage-current density (4.5 × 10–6 A/cm2 at 0.3 MV/cm). This NNO film displayed a large d33 of 123 pC/N, which is the largest d33 value for NNO films to date. Moreover, it shows a very large d33 × g33 (14.8 × 10–12 m2/N), which is the figure of merit for the power of piezoelectric energy harvesters (PEHs). The NNO film grown on SN/Ni at 250 °C for the fabrication of PEH also demonstrated dielectric and piezoelectric characteristics. The NNO PEH exhibited a high power density (2.1 μW/mm3), indicating that the [0 0 1]-oriented NNO film grown on the SN seed layer is a good candidate for PEH. Moreover, this NNO film can be deposited on a polymer substrate and utilized as a future flexible device owing to its very low growth temperature and good physical properties.

Original languageEnglish
Article number153464
JournalApplied Surface Science
Volume593
DOIs
Publication statusPublished - 2022 Aug 15

Keywords

  • Low-temperature deposition process
  • Piezoelectric energy harvester
  • SN nanosheet seed layer
  • [0 0 1]-oriented crystalline NNO thin film

ASJC Scopus subject areas

  • Chemistry(all)
  • Condensed Matter Physics
  • Physics and Astronomy(all)
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films

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