Planarization of the surface of electrowetting on dielectric device for droplet speed improvement

Choonghee Lee, Hee Chan Kim, Honggu Chun

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

The surface roughness aggravates droplet manipulation speed by increasing contact angle hysteresis (CAH) and pinning force between droplet and an electrowetting on dielectric (EWOD) device. Because spacing between electrodes in the EWOD device cannot be filled up by thin film deposition process for an insulation and hydrophobic layer fabrication, trenches as deep as metal electrode layer are generated on the surface. The trenches increase the surface roughness of EWOD device, especially at the edge. In this work, polishing technique (chemical mechanical polishing, CMP) was appplied to EWOD fabrication to remove the trenches on the surface of the EWOD device. To verify the effect of the surface polishing on droplet speed improvement, we fabricated both unpolished and polished EWOD devices that comprised of 0.5 × 0.5, 1 × 1, and 1.5 × 1.5 mm2 electrodes array to manipulate 1 to 10 μL droplets. Droplet speed on the polished devices was improved by 21 to 100 % compared to that of the unpolished one.

Original languageEnglish
Title of host publication17th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2013
PublisherChemical and Biological Microsystems Society
Pages1592-1594
Number of pages3
Volume3
ISBN (Print)9781632666246
Publication statusPublished - 2013 Jan 1
Event17th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2013 - Freiburg, Germany
Duration: 2013 Oct 272013 Oct 31

Other

Other17th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2013
CountryGermany
CityFreiburg
Period13/10/2713/10/31

ASJC Scopus subject areas

  • Bioengineering

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  • Cite this

    Lee, C., Kim, H. C., & Chun, H. (2013). Planarization of the surface of electrowetting on dielectric device for droplet speed improvement. In 17th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2013 (Vol. 3, pp. 1592-1594). Chemical and Biological Microsystems Society.