Abstract
A sprayed carbon nanotube (CNT)-modified working electrode was successfully integrated into an electrochemical three-electrode system based on a glass substrate. The integrated biosensing system was fabricated through a series of photolithographic patterning and plasma etching processes. A CNT-dispersed solution was sprayed on the three-electrode system, and the CNT-modified surface was treated with O2 plasma to pattern, clean, and activate the CNT layer. The optimized plasma treatment conditions were verified in terms of plasma power and treatment time by scanning electron microscopy (SEM), cyclic voltammetry (CV), and X-ray photoelectron spectroscopy (XPS).
| Original language | English |
|---|---|
| Article number | 01AJ08 |
| Journal | Japanese Journal of Applied Physics |
| Volume | 51 |
| Issue number | 1 PART 2 |
| DOIs | |
| Publication status | Published - 2012 Jan 1 |
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ASJC Scopus subject areas
- Engineering(all)
- Physics and Astronomy(all)
Cite this
Plasma-enhanced surface modification of sprayed carbon nanotube electrodes for lithographically integrated biosensing system. / Jin, Joon Hyung; Kim, Joon Hyub; Lee, Jun Yong; Lee, Cheol Jin; Min, Nam Ki.
In: Japanese Journal of Applied Physics, Vol. 51, No. 1 PART 2, 01AJ08, 01.01.2012.Research output: Contribution to journal › Article
}
TY - JOUR
T1 - Plasma-enhanced surface modification of sprayed carbon nanotube electrodes for lithographically integrated biosensing system
AU - Jin, Joon Hyung
AU - Kim, Joon Hyub
AU - Lee, Jun Yong
AU - Lee, Cheol Jin
AU - Min, Nam Ki
PY - 2012/1/1
Y1 - 2012/1/1
N2 - A sprayed carbon nanotube (CNT)-modified working electrode was successfully integrated into an electrochemical three-electrode system based on a glass substrate. The integrated biosensing system was fabricated through a series of photolithographic patterning and plasma etching processes. A CNT-dispersed solution was sprayed on the three-electrode system, and the CNT-modified surface was treated with O2 plasma to pattern, clean, and activate the CNT layer. The optimized plasma treatment conditions were verified in terms of plasma power and treatment time by scanning electron microscopy (SEM), cyclic voltammetry (CV), and X-ray photoelectron spectroscopy (XPS).
AB - A sprayed carbon nanotube (CNT)-modified working electrode was successfully integrated into an electrochemical three-electrode system based on a glass substrate. The integrated biosensing system was fabricated through a series of photolithographic patterning and plasma etching processes. A CNT-dispersed solution was sprayed on the three-electrode system, and the CNT-modified surface was treated with O2 plasma to pattern, clean, and activate the CNT layer. The optimized plasma treatment conditions were verified in terms of plasma power and treatment time by scanning electron microscopy (SEM), cyclic voltammetry (CV), and X-ray photoelectron spectroscopy (XPS).
UR - http://www.scopus.com/inward/record.url?scp=84863147779&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84863147779&partnerID=8YFLogxK
U2 - 10.1143/JJAP.51.01AJ08
DO - 10.1143/JJAP.51.01AJ08
M3 - Article
AN - SCOPUS:84863147779
VL - 51
JO - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
JF - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
SN - 0021-4922
IS - 1 PART 2
M1 - 01AJ08
ER -