Abstract
Investigations of the influence of gas pressure, input power and Ar mixing ratio on the parameters of inductively-coupled HBr plasma were carried out. The investigations combined plasma diagnostics done by using a double Langmuir probes and plasma modeling represented by the 0-dimensional (global) model with a Maxwellian approximation for the electron energy distribution function. From the experiments, an increase in the gas pressure was found to result in an decreasing electron temperature (3.5 - 3.2 eV for 700 W) and electron density (4.7 × 1010 - 2.1 × 1010 cm-3 for 700 W and 2.7 × 1010 - 1.2 × 1010 cm -3 for 400 W). A dilution of the HBr by the Ar up to 60 % caused the same effect on the electron temperature (3.5 - 3.0 eV for 5 mTorr and 700 W), but the electron density increased in the range of 4.7 × 1010 - 1.6 × 1011 cm-3. For the given range of experimental conditions, the model showed an acceptable agreement with the experiments and, thus, provided nearly adequate data on the kinetics of plasma active species and their densities.
| Original language | English |
|---|---|
| Pages (from-to) | 48-55 |
| Number of pages | 8 |
| Journal | Journal of the Korean Physical Society |
| Volume | 52 |
| Issue number | 1 |
| Publication status | Published - 2008 Jan 1 |
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Keywords
- Density
- Dissociation
- HBr plasma
- Ionization
- Rate coefficient
ASJC Scopus subject areas
- Physics and Astronomy(all)
Cite this
Plasma parameters and active species kinetics in an inductively coupled HBr plasma. / Efremov, Alexander; Choi, Bok Gil; Nahm, Sahn; Lee, Hyun Woo; Min, Nam Ki; Kwon, Kwang Ho.
In: Journal of the Korean Physical Society, Vol. 52, No. 1, 01.01.2008, p. 48-55.Research output: Contribution to journal › Article
}
TY - JOUR
T1 - Plasma parameters and active species kinetics in an inductively coupled HBr plasma
AU - Efremov, Alexander
AU - Choi, Bok Gil
AU - Nahm, Sahn
AU - Lee, Hyun Woo
AU - Min, Nam Ki
AU - Kwon, Kwang Ho
PY - 2008/1/1
Y1 - 2008/1/1
N2 - Investigations of the influence of gas pressure, input power and Ar mixing ratio on the parameters of inductively-coupled HBr plasma were carried out. The investigations combined plasma diagnostics done by using a double Langmuir probes and plasma modeling represented by the 0-dimensional (global) model with a Maxwellian approximation for the electron energy distribution function. From the experiments, an increase in the gas pressure was found to result in an decreasing electron temperature (3.5 - 3.2 eV for 700 W) and electron density (4.7 × 1010 - 2.1 × 1010 cm-3 for 700 W and 2.7 × 1010 - 1.2 × 1010 cm -3 for 400 W). A dilution of the HBr by the Ar up to 60 % caused the same effect on the electron temperature (3.5 - 3.0 eV for 5 mTorr and 700 W), but the electron density increased in the range of 4.7 × 1010 - 1.6 × 1011 cm-3. For the given range of experimental conditions, the model showed an acceptable agreement with the experiments and, thus, provided nearly adequate data on the kinetics of plasma active species and their densities.
AB - Investigations of the influence of gas pressure, input power and Ar mixing ratio on the parameters of inductively-coupled HBr plasma were carried out. The investigations combined plasma diagnostics done by using a double Langmuir probes and plasma modeling represented by the 0-dimensional (global) model with a Maxwellian approximation for the electron energy distribution function. From the experiments, an increase in the gas pressure was found to result in an decreasing electron temperature (3.5 - 3.2 eV for 700 W) and electron density (4.7 × 1010 - 2.1 × 1010 cm-3 for 700 W and 2.7 × 1010 - 1.2 × 1010 cm -3 for 400 W). A dilution of the HBr by the Ar up to 60 % caused the same effect on the electron temperature (3.5 - 3.0 eV for 5 mTorr and 700 W), but the electron density increased in the range of 4.7 × 1010 - 1.6 × 1011 cm-3. For the given range of experimental conditions, the model showed an acceptable agreement with the experiments and, thus, provided nearly adequate data on the kinetics of plasma active species and their densities.
KW - Density
KW - Dissociation
KW - HBr plasma
KW - Ionization
KW - Rate coefficient
UR - http://www.scopus.com/inward/record.url?scp=38949105242&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=38949105242&partnerID=8YFLogxK
M3 - Article
VL - 52
SP - 48
EP - 55
JO - Journal of the Korean Physical Society
JF - Journal of the Korean Physical Society
SN - 0374-4884
IS - 1
ER -