Plasma parameters and active species kinetics in an inductively coupled HBr plasma

Alexander Efremov, Bok Gil Choi, Sahn Nahm, Hyun Woo Lee, Nam Ki Min, Kwang Ho Kwon

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Abstract

Investigations of the influence of gas pressure, input power and Ar mixing ratio on the parameters of inductively-coupled HBr plasma were carried out. The investigations combined plasma diagnostics done by using a double Langmuir probes and plasma modeling represented by the 0-dimensional (global) model with a Maxwellian approximation for the electron energy distribution function. From the experiments, an increase in the gas pressure was found to result in an decreasing electron temperature (3.5 - 3.2 eV for 700 W) and electron density (4.7 × 1010 - 2.1 × 1010 cm-3 for 700 W and 2.7 × 1010 - 1.2 × 1010 cm -3 for 400 W). A dilution of the HBr by the Ar up to 60 % caused the same effect on the electron temperature (3.5 - 3.0 eV for 5 mTorr and 700 W), but the electron density increased in the range of 4.7 × 1010 - 1.6 × 1011 cm-3. For the given range of experimental conditions, the model showed an acceptable agreement with the experiments and, thus, provided nearly adequate data on the kinetics of plasma active species and their densities.

Original languageEnglish
Pages (from-to)48-55
Number of pages8
JournalJournal of the Korean Physical Society
Volume52
Issue number1
DOIs
Publication statusPublished - 2008 Jan

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Keywords

  • Density
  • Dissociation
  • HBr plasma
  • Ionization
  • Rate coefficient

ASJC Scopus subject areas

  • Physics and Astronomy(all)

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