Plasma surface modification of blown polyethylene films for uniform atomic layer deposition of Al2O3

Gyeong Beom Lee, Kyung Sik Son, Suk Won Park, Joon Hyung Shim, Byoung Ho Choi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

As polyethylene has unique physical characteristics such as low surface energy, low crystallization temperature, lack of polar groups, complicated lamellar structures, susceptibility to thermal degradation, and so on, most conventional coating techniques are not suitable for it. Atomic layer deposition (ALD) has many benefits over conventional coating techniques, and it can be a good candidate as a coating technique for polyethylene. In this study, a low-temperature ALD technique for depositing layers of Al2O 3 on blown, high-density polyethylene (HDPE) films was investigated. The effect of plasma surface modification on the effectiveness of the ALD technique in Al2O3 layer formation was also studied.

Original languageEnglish
Title of host publicationAtomic Layer Deposition Applications 8
Pages89-92
Number of pages4
Edition13
DOIs
Publication statusPublished - 2012
EventSymposium on Atomic Layer Deposition Applications 8 - 222nd ECS Meeting/PRiME 2012 - Honolulu, HI, United States
Duration: 2012 Oct 72012 Oct 12

Publication series

NameECS Transactions
Number13
Volume50
ISSN (Print)1938-5862
ISSN (Electronic)1938-6737

Other

OtherSymposium on Atomic Layer Deposition Applications 8 - 222nd ECS Meeting/PRiME 2012
CountryUnited States
CityHonolulu, HI
Period12/10/712/10/12

ASJC Scopus subject areas

  • Engineering(all)

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    Lee, G. B., Son, K. S., Park, S. W., Shim, J. H., & Choi, B. H. (2012). Plasma surface modification of blown polyethylene films for uniform atomic layer deposition of Al2O3. In Atomic Layer Deposition Applications 8 (13 ed., pp. 89-92). (ECS Transactions; Vol. 50, No. 13). https://doi.org/10.1149/05013.0089ecst