Poly(dimethylsiloxane)-based packaging technique for microchip fluorescence detection system applications

Young Hwan Kim, Kyeong Sik Shin, Ji Yoon Kang, Eun Gyeong Yang, Kyeong Kap Paek, Dae Shik Seo, Byeong Kwon Ju

Research output: Contribution to journalArticle

26 Citations (Scopus)

Abstract

A simplified integration process including packaging is presented, which enables the realization of the portable fluorescence detection system. A fluorescence detection microchip system consisting of an integrated p-i-n photodiode, an organic light-emitting diode as the light source, an interference filter, and a microchannel was developed. The on-chip fluorescence detector fabricated by poly(dimethylsiloxane) (PDMS)-based packaging had a thin-film structure. A silicon-based integrated p-i-n photodiode combined with an optical filter removed the background noise, which was produced by an excitation source, on the same substrate. The active area of the finger-type p-i-n photodiode was extended to obtain a higher detection sensitivity of fluorescence. The sensitivity and the limit of detection (LOD;S/N = 3) of the system were 0.198 nA/μM and 10μM, respectively.

Original languageEnglish
Pages (from-to)1152-1158
Number of pages7
JournalJournal of Microelectromechanical Systems
Volume15
Issue number5
DOIs
Publication statusPublished - 2006 Oct 1

Fingerprint

Polydimethylsiloxane
Packaging
Photodiodes
Fluorescence
Optical filters
Organic light emitting diodes (OLED)
Microchannels
Light sources
Detectors
Thin films
Silicon
Substrates

Keywords

  • Finger-type p-i-n photodiode
  • Interference filter
  • Microchannel
  • On-chip
  • Organic light-emitting diode (OLED)
  • Poly(dimethylsiloxane) (PDMS)-based packaging

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Mechanical Engineering

Cite this

Poly(dimethylsiloxane)-based packaging technique for microchip fluorescence detection system applications. / Kim, Young Hwan; Shin, Kyeong Sik; Kang, Ji Yoon; Yang, Eun Gyeong; Paek, Kyeong Kap; Seo, Dae Shik; Ju, Byeong Kwon.

In: Journal of Microelectromechanical Systems, Vol. 15, No. 5, 01.10.2006, p. 1152-1158.

Research output: Contribution to journalArticle

Kim, Young Hwan ; Shin, Kyeong Sik ; Kang, Ji Yoon ; Yang, Eun Gyeong ; Paek, Kyeong Kap ; Seo, Dae Shik ; Ju, Byeong Kwon. / Poly(dimethylsiloxane)-based packaging technique for microchip fluorescence detection system applications. In: Journal of Microelectromechanical Systems. 2006 ; Vol. 15, No. 5. pp. 1152-1158.
@article{9989213194974656aa6b650964eaed13,
title = "Poly(dimethylsiloxane)-based packaging technique for microchip fluorescence detection system applications",
abstract = "A simplified integration process including packaging is presented, which enables the realization of the portable fluorescence detection system. A fluorescence detection microchip system consisting of an integrated p-i-n photodiode, an organic light-emitting diode as the light source, an interference filter, and a microchannel was developed. The on-chip fluorescence detector fabricated by poly(dimethylsiloxane) (PDMS)-based packaging had a thin-film structure. A silicon-based integrated p-i-n photodiode combined with an optical filter removed the background noise, which was produced by an excitation source, on the same substrate. The active area of the finger-type p-i-n photodiode was extended to obtain a higher detection sensitivity of fluorescence. The sensitivity and the limit of detection (LOD;S/N = 3) of the system were 0.198 nA/μM and 10μM, respectively.",
keywords = "Finger-type p-i-n photodiode, Interference filter, Microchannel, On-chip, Organic light-emitting diode (OLED), Poly(dimethylsiloxane) (PDMS)-based packaging",
author = "Kim, {Young Hwan} and Shin, {Kyeong Sik} and Kang, {Ji Yoon} and Yang, {Eun Gyeong} and Paek, {Kyeong Kap} and Seo, {Dae Shik} and Ju, {Byeong Kwon}",
year = "2006",
month = "10",
day = "1",
doi = "10.1109/JMEMS.2006.880355",
language = "English",
volume = "15",
pages = "1152--1158",
journal = "Journal of Microelectromechanical Systems",
issn = "1057-7157",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
number = "5",

}

TY - JOUR

T1 - Poly(dimethylsiloxane)-based packaging technique for microchip fluorescence detection system applications

AU - Kim, Young Hwan

AU - Shin, Kyeong Sik

AU - Kang, Ji Yoon

AU - Yang, Eun Gyeong

AU - Paek, Kyeong Kap

AU - Seo, Dae Shik

AU - Ju, Byeong Kwon

PY - 2006/10/1

Y1 - 2006/10/1

N2 - A simplified integration process including packaging is presented, which enables the realization of the portable fluorescence detection system. A fluorescence detection microchip system consisting of an integrated p-i-n photodiode, an organic light-emitting diode as the light source, an interference filter, and a microchannel was developed. The on-chip fluorescence detector fabricated by poly(dimethylsiloxane) (PDMS)-based packaging had a thin-film structure. A silicon-based integrated p-i-n photodiode combined with an optical filter removed the background noise, which was produced by an excitation source, on the same substrate. The active area of the finger-type p-i-n photodiode was extended to obtain a higher detection sensitivity of fluorescence. The sensitivity and the limit of detection (LOD;S/N = 3) of the system were 0.198 nA/μM and 10μM, respectively.

AB - A simplified integration process including packaging is presented, which enables the realization of the portable fluorescence detection system. A fluorescence detection microchip system consisting of an integrated p-i-n photodiode, an organic light-emitting diode as the light source, an interference filter, and a microchannel was developed. The on-chip fluorescence detector fabricated by poly(dimethylsiloxane) (PDMS)-based packaging had a thin-film structure. A silicon-based integrated p-i-n photodiode combined with an optical filter removed the background noise, which was produced by an excitation source, on the same substrate. The active area of the finger-type p-i-n photodiode was extended to obtain a higher detection sensitivity of fluorescence. The sensitivity and the limit of detection (LOD;S/N = 3) of the system were 0.198 nA/μM and 10μM, respectively.

KW - Finger-type p-i-n photodiode

KW - Interference filter

KW - Microchannel

KW - On-chip

KW - Organic light-emitting diode (OLED)

KW - Poly(dimethylsiloxane) (PDMS)-based packaging

UR - http://www.scopus.com/inward/record.url?scp=33749992722&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=33749992722&partnerID=8YFLogxK

U2 - 10.1109/JMEMS.2006.880355

DO - 10.1109/JMEMS.2006.880355

M3 - Article

AN - SCOPUS:33749992722

VL - 15

SP - 1152

EP - 1158

JO - Journal of Microelectromechanical Systems

JF - Journal of Microelectromechanical Systems

SN - 1057-7157

IS - 5

ER -