Post dry etching treatment of nanopillar GaN/InGaN multi-quantum-wells

A. Y. Polyakov, L. A. Alexanyan, M. L. Skorikov, A. V. Chernykh, I. V. Shchemerov, V. N. Murashev, Tae Hwan Kim, In Hwan Lee, S. J. Pearton

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Engineering & Materials Science

Chemical Compounds