The composition and the thickness of II-VI semiconductor ternary alloys is determined simultaneously using the prism coupler technique. This approach, which determines the indices of refraction n with high precision and also the epilayer thicknesses with an uncertainty of less than 0.5%, has been applied to a series of molecular-beam epitaxy grown ternary alloy families, Zn1-xCdxSe, Zn1-xMgxSe, Zn1-xBexSe, Zn1-xMnxSe, and ZnSe1-xTex. It can generate a calibration between n and the alloy composition and the growth rates are obtained concurrently.
|Number of pages||5|
|Journal||Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures|
|Publication status||Published - 2000 May 1|
ASJC Scopus subject areas
- Condensed Matter Physics
- Electrical and Electronic Engineering