Preparation and electrical characteristics of (100), (111), and randomly oriented PZT thin films

Chang Jung Kim, Dae Sung Yoon, Joon Sung Lee, Chaun Gi Choi, Won Jong Lee, Kwangsoo No

Research output: Contribution to journalConference article

Abstract

The (100), (111) and randomly oriented PZT thin films were fabricated on Pt/Ti/Corning 7059 glass using sol-gel method. The thin films having different orientation were fabricated by different drying conditions for pyrolysis. The preferred orientations of the PZT thin films were observed using XRD, rocking curves, and pole figures. The microstructures were investigated using SEM. The hysteresis loops and capacitance-voltage characteristics of the films were investigated using a standardized ferroelectric test system. The dielectric constant and current-voltage characteristics of the films were investigated using an impedance analyzer and pA meter, respectively. The films oriented in a particular direction showed superior electrical characteristics to the randomly oriented films.

Original languageEnglish
Pages (from-to)445-450
Number of pages6
JournalMaterials Research Society Symposium - Proceedings
Volume361
Publication statusPublished - 1995
Externally publishedYes
EventProceedings of the 1994 MRS Fall Meeting - Boston, MA, USA
Duration: 1994 Nov 281994 Dec 1

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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