Preparation and electrical characteristics of (100), (111), and randomly oriented PZT thin films

Chang Jung Kim, Dae Sung Yoon, Joon Sung Lee, Chaun Gi Choi, Won Jong Lee, Kwangsoo No

Research output: Contribution to journalConference article

Abstract

The (100), (111) and randomly oriented PZT thin films were fabricated on Pt/Ti/Corning 7059 glass using sol-gel method. The thin films having different orientation were fabricated by different drying conditions for pyrolysis. The preferred orientations of the PZT thin films were observed using XRD, rocking curves, and pole figures. The microstructures were investigated using SEM. The hysteresis loops and capacitance-voltage characteristics of the films were investigated using a standardized ferroelectric test system. The dielectric constant and current-voltage characteristics of the films were investigated using an impedance analyzer and pA meter, respectively. The films oriented in a particular direction showed superior electrical characteristics to the randomly oriented films.

Original languageEnglish
Pages (from-to)445-450
Number of pages6
JournalMaterials Research Society Symposium - Proceedings
Volume361
Publication statusPublished - 1995 Jan 1
Externally publishedYes
EventProceedings of the 1994 MRS Fall Meeting - Boston, MA, USA
Duration: 1994 Nov 281994 Dec 1

Fingerprint

Thin films
preparation
thin films
capacitance-voltage characteristics
Current voltage characteristics
Hysteresis loops
Sol-gel process
drying
Ferroelectric materials
pyrolysis
Poles
analyzers
Drying
Pyrolysis
Permittivity
Capacitance
poles
hysteresis
impedance
gels

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

Cite this

Preparation and electrical characteristics of (100), (111), and randomly oriented PZT thin films. / Kim, Chang Jung; Yoon, Dae Sung; Lee, Joon Sung; Choi, Chaun Gi; Lee, Won Jong; No, Kwangsoo.

In: Materials Research Society Symposium - Proceedings, Vol. 361, 01.01.1995, p. 445-450.

Research output: Contribution to journalConference article

Kim, Chang Jung ; Yoon, Dae Sung ; Lee, Joon Sung ; Choi, Chaun Gi ; Lee, Won Jong ; No, Kwangsoo. / Preparation and electrical characteristics of (100), (111), and randomly oriented PZT thin films. In: Materials Research Society Symposium - Proceedings. 1995 ; Vol. 361. pp. 445-450.
@article{4bb5ec38a7df4114b78ff739f9ff3c83,
title = "Preparation and electrical characteristics of (100), (111), and randomly oriented PZT thin films",
abstract = "The (100), (111) and randomly oriented PZT thin films were fabricated on Pt/Ti/Corning 7059 glass using sol-gel method. The thin films having different orientation were fabricated by different drying conditions for pyrolysis. The preferred orientations of the PZT thin films were observed using XRD, rocking curves, and pole figures. The microstructures were investigated using SEM. The hysteresis loops and capacitance-voltage characteristics of the films were investigated using a standardized ferroelectric test system. The dielectric constant and current-voltage characteristics of the films were investigated using an impedance analyzer and pA meter, respectively. The films oriented in a particular direction showed superior electrical characteristics to the randomly oriented films.",
author = "Kim, {Chang Jung} and Yoon, {Dae Sung} and Lee, {Joon Sung} and Choi, {Chaun Gi} and Lee, {Won Jong} and Kwangsoo No",
year = "1995",
month = "1",
day = "1",
language = "English",
volume = "361",
pages = "445--450",
journal = "Materials Research Society Symposium Proceedings",
issn = "0272-9172",
publisher = "Materials Research Society",

}

TY - JOUR

T1 - Preparation and electrical characteristics of (100), (111), and randomly oriented PZT thin films

AU - Kim, Chang Jung

AU - Yoon, Dae Sung

AU - Lee, Joon Sung

AU - Choi, Chaun Gi

AU - Lee, Won Jong

AU - No, Kwangsoo

PY - 1995/1/1

Y1 - 1995/1/1

N2 - The (100), (111) and randomly oriented PZT thin films were fabricated on Pt/Ti/Corning 7059 glass using sol-gel method. The thin films having different orientation were fabricated by different drying conditions for pyrolysis. The preferred orientations of the PZT thin films were observed using XRD, rocking curves, and pole figures. The microstructures were investigated using SEM. The hysteresis loops and capacitance-voltage characteristics of the films were investigated using a standardized ferroelectric test system. The dielectric constant and current-voltage characteristics of the films were investigated using an impedance analyzer and pA meter, respectively. The films oriented in a particular direction showed superior electrical characteristics to the randomly oriented films.

AB - The (100), (111) and randomly oriented PZT thin films were fabricated on Pt/Ti/Corning 7059 glass using sol-gel method. The thin films having different orientation were fabricated by different drying conditions for pyrolysis. The preferred orientations of the PZT thin films were observed using XRD, rocking curves, and pole figures. The microstructures were investigated using SEM. The hysteresis loops and capacitance-voltage characteristics of the films were investigated using a standardized ferroelectric test system. The dielectric constant and current-voltage characteristics of the films were investigated using an impedance analyzer and pA meter, respectively. The films oriented in a particular direction showed superior electrical characteristics to the randomly oriented films.

UR - http://www.scopus.com/inward/record.url?scp=0029212527&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0029212527&partnerID=8YFLogxK

M3 - Conference article

AN - SCOPUS:0029212527

VL - 361

SP - 445

EP - 450

JO - Materials Research Society Symposium Proceedings

JF - Materials Research Society Symposium Proceedings

SN - 0272-9172

ER -