Preparation and property characterization of oriented PLZT thin films processed using sol-gel method

Dae Sung Yoon, Jung Kim Chang, Sung Lee Joon, Gi Choi Chaun, Jong Lee Won, Kwangsoo No

Research output: Contribution to journalConference article

1 Citation (Scopus)

Abstract

Highly preferentially oriented lead lathanum zirconate titanate(PLZT) thin films were fabricated on various substrates using the spin coating of metal organic solutions having the composition of (9/50/50) and (10/0/100). The substrates used in this study were SrTi03(100), MgO(100), r-plane sapphire, PLT-coated glass, and Pt/Ti/MgO substrates. The films were heat-treated at 600 °C and 700 °C using the direct insertion method. The phases and the orientation of the PLZT thin films were examined using X-ray diffraction(XRD). Pole figure and X-ray rocking curves were measured to study the film orientation. The films were grown with (100), (110), and (001) plane being parallel to the surfaces of SrTiO3, sapphire, and Pt/Ti/MgO, respectively.The dielectric and optical properties of both the oriented films and the polycrystalline films were measured and discussed.

Original languageEnglish
Pages (from-to)499-504
Number of pages6
JournalMaterials Research Society Symposium - Proceedings
Volume343
Publication statusPublished - 1994 Dec 1
Externally publishedYes
EventProceedings of the 1994 MRS Spring Meeting - San Francisco, CA, USA
Duration: 1994 Apr 51994 Apr 7

Fingerprint

Sol-gel process
Lead
gels
Thin films
preparation
thin films
Aluminum Oxide
Sapphire
sapphire
Substrates
Spin coating
Dielectric properties
coating
dielectric properties
insertion
Poles
x rays
poles
Optical properties
Metals

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials

Cite this

Preparation and property characterization of oriented PLZT thin films processed using sol-gel method. / Yoon, Dae Sung; Chang, Jung Kim; Joon, Sung Lee; Chaun, Gi Choi; Won, Jong Lee; No, Kwangsoo.

In: Materials Research Society Symposium - Proceedings, Vol. 343, 01.12.1994, p. 499-504.

Research output: Contribution to journalConference article

Yoon, Dae Sung ; Chang, Jung Kim ; Joon, Sung Lee ; Chaun, Gi Choi ; Won, Jong Lee ; No, Kwangsoo. / Preparation and property characterization of oriented PLZT thin films processed using sol-gel method. In: Materials Research Society Symposium - Proceedings. 1994 ; Vol. 343. pp. 499-504.
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abstract = "Highly preferentially oriented lead lathanum zirconate titanate(PLZT) thin films were fabricated on various substrates using the spin coating of metal organic solutions having the composition of (9/50/50) and (10/0/100). The substrates used in this study were SrTi03(100), MgO(100), r-plane sapphire, PLT-coated glass, and Pt/Ti/MgO substrates. The films were heat-treated at 600 °C and 700 °C using the direct insertion method. The phases and the orientation of the PLZT thin films were examined using X-ray diffraction(XRD). Pole figure and X-ray rocking curves were measured to study the film orientation. The films were grown with (100), (110), and (001) plane being parallel to the surfaces of SrTiO3, sapphire, and Pt/Ti/MgO, respectively.The dielectric and optical properties of both the oriented films and the polycrystalline films were measured and discussed.",
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AU - Yoon, Dae Sung

AU - Chang, Jung Kim

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AU - Chaun, Gi Choi

AU - Won, Jong Lee

AU - No, Kwangsoo

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N2 - Highly preferentially oriented lead lathanum zirconate titanate(PLZT) thin films were fabricated on various substrates using the spin coating of metal organic solutions having the composition of (9/50/50) and (10/0/100). The substrates used in this study were SrTi03(100), MgO(100), r-plane sapphire, PLT-coated glass, and Pt/Ti/MgO substrates. The films were heat-treated at 600 °C and 700 °C using the direct insertion method. The phases and the orientation of the PLZT thin films were examined using X-ray diffraction(XRD). Pole figure and X-ray rocking curves were measured to study the film orientation. The films were grown with (100), (110), and (001) plane being parallel to the surfaces of SrTiO3, sapphire, and Pt/Ti/MgO, respectively.The dielectric and optical properties of both the oriented films and the polycrystalline films were measured and discussed.

AB - Highly preferentially oriented lead lathanum zirconate titanate(PLZT) thin films were fabricated on various substrates using the spin coating of metal organic solutions having the composition of (9/50/50) and (10/0/100). The substrates used in this study were SrTi03(100), MgO(100), r-plane sapphire, PLT-coated glass, and Pt/Ti/MgO substrates. The films were heat-treated at 600 °C and 700 °C using the direct insertion method. The phases and the orientation of the PLZT thin films were examined using X-ray diffraction(XRD). Pole figure and X-ray rocking curves were measured to study the film orientation. The films were grown with (100), (110), and (001) plane being parallel to the surfaces of SrTiO3, sapphire, and Pt/Ti/MgO, respectively.The dielectric and optical properties of both the oriented films and the polycrystalline films were measured and discussed.

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