Preparation and property characterization of oriented PLZT thin films processed using sol-gel method

Sung Yoon Dae, Jung Kim Chang, Sung Lee Joon, Gi Choi Chaun, Jong Lee Won, Kwangsoo No

Research output: Contribution to journalConference article

1 Citation (Scopus)

Abstract

Highly preferentially oriented lead lathanum zirconate titanate(PLZT) thin films were fabricated on various substrates using the spin coating of metal organic solutions having the composition of (9/50/50) and (10/0/100). The substrates used in this study were SrTi03(100), MgO(100), r-plane sapphire, PLT-coated glass, and Pt/Ti/MgO substrates. The films were heat-treated at 600 °C and 700 °C using the direct insertion method. The phases and the orientation of the PLZT thin films were examined using X-ray diffraction(XRD). Pole figure and X-ray rocking curves were measured to study the film orientation. The films were grown with (100), (110), and (001) plane being parallel to the surfaces of SrTiO3, sapphire, and Pt/Ti/MgO, respectively.The dielectric and optical properties of both the oriented films and the polycrystalline films were measured and discussed.

Original languageEnglish
Pages (from-to)499-504
Number of pages6
JournalMaterials Research Society Symposium - Proceedings
Volume343
Publication statusPublished - 1994
Externally publishedYes
EventProceedings of the 1994 MRS Spring Meeting - San Francisco, CA, USA
Duration: 1994 Apr 51994 Apr 7

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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