Preparation of piezoelectric 0.1Pb(Zn0.5W0.5)O3-0.9Pb(Zr0.5Ti0.5)O3 solid solution and thick films for low temperature firing on a Si-substrate

Tae Yun Kwon, Jae Hong Park, Yong Bum Kim, Dae Sung Yoon, Chae Il Cheon, Hong Lim Lee, Tae Song Kim

Research output: Contribution to journalArticle

15 Citations (Scopus)

Abstract

A newly designed lead zirconate titanate (PZT) solid solution 0.1Pb(Zn0.5W0.5)O3-0.9Pb(Zr0.5Ti0.5)O3 was prepared. It is feasible for a low temperature firing. X-ray diffraction shows that its structure is a single perovskite phase, and its thick films were successfully fabricated on a Pt/TiO2/SiNx/Si-substrate through the screen printing method. A conventional screen printing thick film and a hybrid thick film (screen printing and PZT sol infiltration) was also compared. According to an SEM study, the prepared thick film showed a much denser microstructure with the sol infiltration method. The electrical properties of the prepared PZT solid solution and its thick film were predominantly realized in a low temperature region. The dielectric constant of a conventional screen printing thick film and the hybrid thick film (sintered at 900 °C), was 703.5 and 911.3, respectively.

Original languageEnglish
Pages (from-to)172-178
Number of pages7
JournalJournal of Crystal Growth
Volume295
Issue number2
DOIs
Publication statusPublished - 2006 Oct 1
Externally publishedYes

Fingerprint

Thick films
thick films
Solid solutions
solid solutions
Screen printing
preparation
printing
Substrates
Temperature
Polymethyl Methacrylate
infiltration
Sols
Infiltration
Perovskite
Electric properties
Permittivity
electrical properties
permittivity
X ray diffraction
microstructure

Keywords

  • A3. Polycrystalline deposition
  • B1. Perovskites
  • B2. Dielectric materials
  • B2. Piezoelectric materials

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Inorganic Chemistry
  • Materials Chemistry

Cite this

Preparation of piezoelectric 0.1Pb(Zn0.5W0.5)O3-0.9Pb(Zr0.5Ti0.5)O3 solid solution and thick films for low temperature firing on a Si-substrate. / Kwon, Tae Yun; Park, Jae Hong; Kim, Yong Bum; Yoon, Dae Sung; Cheon, Chae Il; Lee, Hong Lim; Kim, Tae Song.

In: Journal of Crystal Growth, Vol. 295, No. 2, 01.10.2006, p. 172-178.

Research output: Contribution to journalArticle

Kwon, Tae Yun ; Park, Jae Hong ; Kim, Yong Bum ; Yoon, Dae Sung ; Cheon, Chae Il ; Lee, Hong Lim ; Kim, Tae Song. / Preparation of piezoelectric 0.1Pb(Zn0.5W0.5)O3-0.9Pb(Zr0.5Ti0.5)O3 solid solution and thick films for low temperature firing on a Si-substrate. In: Journal of Crystal Growth. 2006 ; Vol. 295, No. 2. pp. 172-178.
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