Preparation on transparent flexible piezoelectric energy harvester based on PZT films by laser lift-off process

Young Ho Do, Woo Sukjung, Min Gyu Kang, Chong-Yun Kang, Seokjin Yoon

Research output: Contribution to journalArticle

29 Citations (Scopus)

Abstract

The piezoelectric energy generation properties of transparent flexible devices (TFD) based on PbZr0.52Ti0.48O3 (PZT) films, which were fabricated by laser lift-off (LLO) process, were studied for a piezoelectric energy harvester. Through the introduction of indium-tin-oxide (ITO) and polyethylene terephthalate (PET) substrates, TFDs were implemented, respectively. The TFDs based on PZT films generated an AC-type output signal and output power of 8.4 nW/cm2, at periodically bending and releasing motion. In addition, inverted output signals were observed when the manufactured TFDs were connected to the measuring equipment in reverse and were bended to the reverse direction, demonstrating that the generating signals originated from the piezoelectric effect of TFDs. The experimental results clearly showed that the TFDs based PZT film have potential for use in next generation of electronic devices applications such as flexible devices, transparent electronics, and energy harvester.

Original languageEnglish
Pages (from-to)51-55
Number of pages5
JournalSensors and Actuators, A: Physical
Volume200
DOIs
Publication statusPublished - 2013 Jan 1

Fingerprint

Harvesters
preparation
Lasers
output
lasers
Polyethylene Terephthalates
Piezoelectricity
polyethylene terephthalate
releasing
Tin oxides
electronics
Polyethylene terephthalates
indium oxides
Indium
tin oxides
energy
alternating current
Electronic equipment
Substrates

Keywords

  • Ferroelectric properties
  • Films process
  • Functional applications
  • Laser lift-off
  • PZT
  • Transparent flexible electronics

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Condensed Matter Physics
  • Electronic, Optical and Magnetic Materials
  • Metals and Alloys
  • Surfaces, Coatings and Films
  • Instrumentation

Cite this

Preparation on transparent flexible piezoelectric energy harvester based on PZT films by laser lift-off process. / Do, Young Ho; Sukjung, Woo; Kang, Min Gyu; Kang, Chong-Yun; Yoon, Seokjin.

In: Sensors and Actuators, A: Physical, Vol. 200, 01.01.2013, p. 51-55.

Research output: Contribution to journalArticle

Do, Young Ho ; Sukjung, Woo ; Kang, Min Gyu ; Kang, Chong-Yun ; Yoon, Seokjin. / Preparation on transparent flexible piezoelectric energy harvester based on PZT films by laser lift-off process. In: Sensors and Actuators, A: Physical. 2013 ; Vol. 200. pp. 51-55.
@article{2f320ee13bd949e0a5de143ca23aa2c4,
title = "Preparation on transparent flexible piezoelectric energy harvester based on PZT films by laser lift-off process",
abstract = "The piezoelectric energy generation properties of transparent flexible devices (TFD) based on PbZr0.52Ti0.48O3 (PZT) films, which were fabricated by laser lift-off (LLO) process, were studied for a piezoelectric energy harvester. Through the introduction of indium-tin-oxide (ITO) and polyethylene terephthalate (PET) substrates, TFDs were implemented, respectively. The TFDs based on PZT films generated an AC-type output signal and output power of 8.4 nW/cm2, at periodically bending and releasing motion. In addition, inverted output signals were observed when the manufactured TFDs were connected to the measuring equipment in reverse and were bended to the reverse direction, demonstrating that the generating signals originated from the piezoelectric effect of TFDs. The experimental results clearly showed that the TFDs based PZT film have potential for use in next generation of electronic devices applications such as flexible devices, transparent electronics, and energy harvester.",
keywords = "Ferroelectric properties, Films process, Functional applications, Laser lift-off, PZT, Transparent flexible electronics",
author = "Do, {Young Ho} and Woo Sukjung and Kang, {Min Gyu} and Chong-Yun Kang and Seokjin Yoon",
year = "2013",
month = "1",
day = "1",
doi = "10.1016/j.sna.2012.10.034",
language = "English",
volume = "200",
pages = "51--55",
journal = "Sensors and Actuators, A: Physical",
issn = "0924-4247",
publisher = "Elsevier",

}

TY - JOUR

T1 - Preparation on transparent flexible piezoelectric energy harvester based on PZT films by laser lift-off process

AU - Do, Young Ho

AU - Sukjung, Woo

AU - Kang, Min Gyu

AU - Kang, Chong-Yun

AU - Yoon, Seokjin

PY - 2013/1/1

Y1 - 2013/1/1

N2 - The piezoelectric energy generation properties of transparent flexible devices (TFD) based on PbZr0.52Ti0.48O3 (PZT) films, which were fabricated by laser lift-off (LLO) process, were studied for a piezoelectric energy harvester. Through the introduction of indium-tin-oxide (ITO) and polyethylene terephthalate (PET) substrates, TFDs were implemented, respectively. The TFDs based on PZT films generated an AC-type output signal and output power of 8.4 nW/cm2, at periodically bending and releasing motion. In addition, inverted output signals were observed when the manufactured TFDs were connected to the measuring equipment in reverse and were bended to the reverse direction, demonstrating that the generating signals originated from the piezoelectric effect of TFDs. The experimental results clearly showed that the TFDs based PZT film have potential for use in next generation of electronic devices applications such as flexible devices, transparent electronics, and energy harvester.

AB - The piezoelectric energy generation properties of transparent flexible devices (TFD) based on PbZr0.52Ti0.48O3 (PZT) films, which were fabricated by laser lift-off (LLO) process, were studied for a piezoelectric energy harvester. Through the introduction of indium-tin-oxide (ITO) and polyethylene terephthalate (PET) substrates, TFDs were implemented, respectively. The TFDs based on PZT films generated an AC-type output signal and output power of 8.4 nW/cm2, at periodically bending and releasing motion. In addition, inverted output signals were observed when the manufactured TFDs were connected to the measuring equipment in reverse and were bended to the reverse direction, demonstrating that the generating signals originated from the piezoelectric effect of TFDs. The experimental results clearly showed that the TFDs based PZT film have potential for use in next generation of electronic devices applications such as flexible devices, transparent electronics, and energy harvester.

KW - Ferroelectric properties

KW - Films process

KW - Functional applications

KW - Laser lift-off

KW - PZT

KW - Transparent flexible electronics

UR - http://www.scopus.com/inward/record.url?scp=84885388546&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84885388546&partnerID=8YFLogxK

U2 - 10.1016/j.sna.2012.10.034

DO - 10.1016/j.sna.2012.10.034

M3 - Article

AN - SCOPUS:84885388546

VL - 200

SP - 51

EP - 55

JO - Sensors and Actuators, A: Physical

JF - Sensors and Actuators, A: Physical

SN - 0924-4247

ER -