Process variability analysis of a Si/SiGe HBT technology with greater than 200 GHz performance

D. C. Ahlgren, B. Jagannathan, S. J. Jeng, P. Smith, D. Angell, H. Chen, M. Khater, F. Pagette, J. S. Rieh, K. Schonenberg, A. Stricker, G. Freeman, A. Joseph, K. Stein, S. Subbanna

Research output: Contribution to conferencePaperpeer-review

10 Citations (Scopus)

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Engineering & Materials Science