Processing technique for single-walled carbon nanotube-based sensor arrays

Kyeong Heon Kim, Chi Woong Jang, Tae Geun Kim, Seok Lee, Sun Ho Kim, Young Tae Byun

Research output: Contribution to journalArticle

5 Citations (Scopus)

Abstract

We investigated a selective assembly method of fabricating single-walled carbon nanotubes (SWCNTs) on a silicon-dioxide (SiO 2) surface by using only a photolithographic process; then, we fabricated 8×8 field-emission transistor (FET) arrays for sensor applications. Photoresist (PR) patterns were made on a SiO 2-grown Si substrate by using the photolithographic process. This PR-patterned substrate was dipped into a SWCNT solution dispersed in dichlorobenzene (DCB). The PR patterns were removed by using acetone. As a result, selectively-assembled SWCNT channels in 8×8 FET arrays could be fabricated between source and drain electrodes without complicated chemical steps using octadecyltrichlorosilane (OTS). Finally, we successfully fabricated 8×8 SWCNT-based multi-channel FET arrays by using our novel self-assembly method.

Original languageEnglish
Pages (from-to)1251-1255
Number of pages5
JournalJournal of Nanoscience and Nanotechnology
Volume12
Issue number2
DOIs
Publication statusPublished - 2012 Jun 5

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Keywords

  • FET arrays
  • Photolithography
  • SAM
  • Sensor
  • SWCNT

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Chemistry(all)
  • Materials Science(all)
  • Bioengineering
  • Biomedical Engineering

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