Properties of hydorogenated Al-doped ZnO films by multi-step texture

Sung Ju Tark, Min Gu Kang, Sungeun Park, Yong Hyun Kim, Won Mok Kim, Donghwan Kim

Research output: Contribution to journalArticle

1 Citation (Scopus)

Abstract

In this study we investigated the effect of the multi-step texturing process on the electrical and optical properties of hydrogenated Al-doped zinc oxide (HAZO) thin films deposited by rf magnetron sputtering. AZO films on glass were prepared by changing the H2/(Ar+H2) ratio at a low temperature of 150 °C. The prepared HAZO films showed lower resistivity and higher carrier concentration and mobility than those of non-hydrogenated AZO films. After deposition, the surface of the HAZO films was multi-step textured in diluted HCl (0.5%) for the investigation of the change in the optical properties and the surface morphology due to etching. As a result, the HAZO film fabricated under the type III condition showed excellent optical properties with a haze value of 52.3%.

Original languageEnglish
Pages (from-to)259-264
Number of pages6
JournalKorean Journal of Materials Research
Volume19
Issue number5
DOIs
Publication statusPublished - 2009 Aug 18

Fingerprint

Zinc Oxide
Zinc oxide
Oxide films
Textures
Optical properties
Texturing
Carrier mobility
Magnetron sputtering
Surface morphology
Carrier concentration
Etching
Electric properties
Glass
Thin films
Temperature

Keywords

  • Hydrogenated
  • Rf magnetron sputter
  • Surface textured
  • TCO
  • ZnO : Al

ASJC Scopus subject areas

  • Materials Science(all)

Cite this

Properties of hydorogenated Al-doped ZnO films by multi-step texture. / Tark, Sung Ju; Kang, Min Gu; Park, Sungeun; Kim, Yong Hyun; Kim, Won Mok; Kim, Donghwan.

In: Korean Journal of Materials Research, Vol. 19, No. 5, 18.08.2009, p. 259-264.

Research output: Contribution to journalArticle

Tark, Sung Ju ; Kang, Min Gu ; Park, Sungeun ; Kim, Yong Hyun ; Kim, Won Mok ; Kim, Donghwan. / Properties of hydorogenated Al-doped ZnO films by multi-step texture. In: Korean Journal of Materials Research. 2009 ; Vol. 19, No. 5. pp. 259-264.
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