Properties of hydorogenated Al-doped ZnO films by multi-step texture

Sung Ju Tark, Min Gu Kang, Sungeun Park, Yong Hyun Kim, Won Mok Kim, Donghwan Kim

Research output: Contribution to journalArticlepeer-review

1 Citation (Scopus)


In this study we investigated the effect of the multi-step texturing process on the electrical and optical properties of hydrogenated Al-doped zinc oxide (HAZO) thin films deposited by rf magnetron sputtering. AZO films on glass were prepared by changing the H2/(Ar+H2) ratio at a low temperature of 150 °C. The prepared HAZO films showed lower resistivity and higher carrier concentration and mobility than those of non-hydrogenated AZO films. After deposition, the surface of the HAZO films was multi-step textured in diluted HCl (0.5%) for the investigation of the change in the optical properties and the surface morphology due to etching. As a result, the HAZO film fabricated under the type III condition showed excellent optical properties with a haze value of 52.3%.

Original languageEnglish
Pages (from-to)259-264
Number of pages6
JournalKorean Journal of Materials Research
Issue number5
Publication statusPublished - 2009


  • Hydrogenated
  • Rf magnetron sputter
  • Surface textured
  • TCO
  • ZnO : Al

ASJC Scopus subject areas

  • Materials Science(all)


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