Properties of piezoelectric actuator on silicon membrane, prepared by screen printing method

Sang Jong Kim, Chong Yun Kang, Ji Won Choi, Dal Young Kim, Man Young Sung, Hyun Jai Kim, Seok Jin Yoon

Research output: Contribution to journalReview article

16 Citations (Scopus)

Abstract

Characteristics of piezoelectric actuator on Si membrane were investigated. Si membranes were fabricated as a function of size using bulk micromachining method. Bottom electrode Ag-Pd and piezoelectric thick films were fabricated using screen printing method, respectively. Piezoelectric thick films were sintered by rapid thermal annealing (RTA). Top electrodes Pt were deposited by DC sputtering system. We analyzed micro structure by scanning electron microscope (SEM) and investigated dynamic properties by MTI2000. Therefore, piezoelectric thick film on Si membrane had Pr of 15.7 μC cm -2. The maximum displacement of micro actuator had 0.05 μm. We find the combination of thick film printing and MEMS process to form a Si membrane micro actuator.

Original languageEnglish
Pages (from-to)401-404
Number of pages4
JournalMaterials Chemistry and Physics
Volume90
Issue number2-3
DOIs
Publication statusPublished - 2005 Apr 15

Keywords

  • Bulk micromachining
  • Piezoelectric actuator
  • Screen printing method

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics

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    Kim, S. J., Kang, C. Y., Choi, J. W., Kim, D. Y., Sung, M. Y., Kim, H. J., & Yoon, S. J. (2005). Properties of piezoelectric actuator on silicon membrane, prepared by screen printing method. Materials Chemistry and Physics, 90(2-3), 401-404. https://doi.org/10.1016/j.matchemphys.2004.09.038