Properties of the TiO2 membranes prepared by CVD of titanium tetraisopropoxide

Heung Yong Ha, SukWoo Nam, Tae Hoon Lim, In Hwan Oh, Seong Ahn Hong

Research output: Contribution to journalArticle

74 Citations (Scopus)

Abstract

Thin films of TiO2 were deposited on the inner surface of porous Vycor glass tubes by atmospheric pressure chemical vapor deposition (APCVD) at temperatures ranging from 200 to 400°C using titanium isopropoxide as a precursor. Dense and hydrogen-permselective membranes were formed only in the temperature range between 230 and 300°C. Gas permeation through the dense membrane was governed by an activated diffusion mechanism and the H2:N2 permeation ratio was far beyond the range of Knudsen diffusion. At 200 and 400°C, however, highly porous films were formed and the permselectivity of the membrane was not improved at all, because gas permeation through the porous membrane was in the Knudsen diffusion regime. Selectivity (H2:N2 permeation ratio) profile showed a maximum value of 57 at a deposition temperature of 250°C. The oxygen added to the reaction environment appeared to have some effects on the stability and the permselectivity of the membrane formed. The permeation properties of the TiO2 membranes were not so appreciable and the stability of the membrane was poor when compared with dense SiO2 membranes. The characterization of the TiO2 films by SEM and TEM reveals that phase change from amorphous to crystalline state occurs at a temperature about 300°C.

Original languageEnglish
Pages (from-to)81-92
Number of pages12
JournalJournal of Membrane Science
Volume111
Issue number1
DOIs
Publication statusPublished - 1996 Mar 6
Externally publishedYes

Fingerprint

Chemical vapor deposition
titanium
Titanium
vapor deposition
Permeation
membranes
Membranes
Temperature
Permselective membranes
Gases
Vycor
Atmospheric Pressure
temperature
titanium isopropoxide
Motion Pictures
Atmospheric pressure
gases
Hydrogen
Glass
atmospheric pressure

Keywords

  • Chemical vapor deposition (CVD)
  • Gas permeability
  • Hydrogen selectivity
  • Inorganic membrane
  • Titania

ASJC Scopus subject areas

  • Filtration and Separation
  • Polymers and Plastics

Cite this

Properties of the TiO2 membranes prepared by CVD of titanium tetraisopropoxide. / Ha, Heung Yong; Nam, SukWoo; Lim, Tae Hoon; Oh, In Hwan; Hong, Seong Ahn.

In: Journal of Membrane Science, Vol. 111, No. 1, 06.03.1996, p. 81-92.

Research output: Contribution to journalArticle

Ha, Heung Yong ; Nam, SukWoo ; Lim, Tae Hoon ; Oh, In Hwan ; Hong, Seong Ahn. / Properties of the TiO2 membranes prepared by CVD of titanium tetraisopropoxide. In: Journal of Membrane Science. 1996 ; Vol. 111, No. 1. pp. 81-92.
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