Proton incorporation in yttria-stabilized zirconia during atomic layer deposition

Kiho Bae; Kyung Sik Son; Jun Woo Kim; Suk Won Park; Jihwan An; Fritz B. Prinz; Joon Hyung Shim

doi:10.1016/j.ijhydene.2013.11.023

Proton incorporation in yttria-stabilized zirconia during atomic layer deposition

Kiho Bae, Kyung Sik Son, Jun Woo Kim, Suk Won Park, Jihwan An, Fritz B. Prinz, Joon Hyung Shim

School of Mechanical Engineering

Research output: Contribution to journal › Article › peer-review

10 Citations (Scopus)

Abstract

This work elucidated the proton-incorporation mechanism in ALD YSZ ¹. Isotope ²H₂O was used as an oxidant to trace proton incorporation. The ratio of ZrO₂ to Y₂O ₃ ALD cycles was varied from 1:1 to 5:1. TEM confirmed that the ALD YSZ films grew as fully crystallized columnar grains in the cubic ZrO ₂ phase. SIMS indicated that the Y³⁺ and ²H⁺ concentrations were linearly correlated, indicating yttria-deposition-induced proton incorporation. XPS confirmed an appreciable amount of Y(OH)₃ proportional to the ²H⁺ content in the ALD YSZ, as was also detected by SIMS. Oxide ion vacancies created by the replacement of ZrO₂ with relatively small amounts of Y₂O₃ provided additional vacancies for proton incorporation, resulting in steeper [²H⁺]/[Y³⁺] slopes.

Original language	English
Pages (from-to)	2621-2627
Number of pages	7
Journal	International Journal of Hydrogen Energy
Volume	39
Issue number	6
DOIs	https://doi.org/10.1016/j.ijhydene.2013.11.023
Publication status	Published - 2014 Feb 14

Keywords

Atomic layer deposition
Protons
Secondary ion mass spectrometry
Yttria-stabilized zirconia

ASJC Scopus subject areas

Renewable Energy, Sustainability and the Environment
Fuel Technology
Condensed Matter Physics
Energy Engineering and Power Technology

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

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10.1016/j.ijhydene.2013.11.023

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@article{b87a40b485ed489b9d36a11af7e5775f,

title = "Proton incorporation in yttria-stabilized zirconia during atomic layer deposition",

abstract = "This work elucidated the proton-incorporation mechanism in ALD YSZ 1. Isotope 2H2O was used as an oxidant to trace proton incorporation. The ratio of ZrO2 to Y2O 3 ALD cycles was varied from 1:1 to 5:1. TEM confirmed that the ALD YSZ films grew as fully crystallized columnar grains in the cubic ZrO 2 phase. SIMS indicated that the Y3+ and 2H+ concentrations were linearly correlated, indicating yttria-deposition-induced proton incorporation. XPS confirmed an appreciable amount of Y(OH)3 proportional to the 2H+ content in the ALD YSZ, as was also detected by SIMS. Oxide ion vacancies created by the replacement of ZrO2 with relatively small amounts of Y2O3 provided additional vacancies for proton incorporation, resulting in steeper [2H+]/[Y3+] slopes.",

keywords = "Atomic layer deposition, Protons, Secondary ion mass spectrometry, Yttria-stabilized zirconia",

author = "Kiho Bae and Son, {Kyung Sik} and Kim, {Jun Woo} and Park, {Suk Won} and Jihwan An and Prinz, {Fritz B.} and Shim, {Joon Hyung}",

note = "Funding Information: We are grateful to the Fusion Research Program for Green Technologies of the National Research Foundation (NRF) of Korea funded by the Ministry of Education, Science, and Technology (grant no. NRF-2011-0019300 ).",

year = "2014",

month = feb,

day = "14",

doi = "10.1016/j.ijhydene.2013.11.023",

language = "English",

volume = "39",

pages = "2621--2627",

journal = "International Journal of Hydrogen Energy",

issn = "0360-3199",

publisher = "Elsevier Limited",

number = "6",

}

TY - JOUR

T1 - Proton incorporation in yttria-stabilized zirconia during atomic layer deposition

AU - Bae, Kiho

AU - Son, Kyung Sik

AU - Kim, Jun Woo

AU - Park, Suk Won

AU - An, Jihwan

AU - Prinz, Fritz B.

AU - Shim, Joon Hyung

N1 - Funding Information: We are grateful to the Fusion Research Program for Green Technologies of the National Research Foundation (NRF) of Korea funded by the Ministry of Education, Science, and Technology (grant no. NRF-2011-0019300 ).

PY - 2014/2/14

Y1 - 2014/2/14

N2 - This work elucidated the proton-incorporation mechanism in ALD YSZ 1. Isotope 2H2O was used as an oxidant to trace proton incorporation. The ratio of ZrO2 to Y2O 3 ALD cycles was varied from 1:1 to 5:1. TEM confirmed that the ALD YSZ films grew as fully crystallized columnar grains in the cubic ZrO 2 phase. SIMS indicated that the Y3+ and 2H+ concentrations were linearly correlated, indicating yttria-deposition-induced proton incorporation. XPS confirmed an appreciable amount of Y(OH)3 proportional to the 2H+ content in the ALD YSZ, as was also detected by SIMS. Oxide ion vacancies created by the replacement of ZrO2 with relatively small amounts of Y2O3 provided additional vacancies for proton incorporation, resulting in steeper [2H+]/[Y3+] slopes.

AB - This work elucidated the proton-incorporation mechanism in ALD YSZ 1. Isotope 2H2O was used as an oxidant to trace proton incorporation. The ratio of ZrO2 to Y2O 3 ALD cycles was varied from 1:1 to 5:1. TEM confirmed that the ALD YSZ films grew as fully crystallized columnar grains in the cubic ZrO 2 phase. SIMS indicated that the Y3+ and 2H+ concentrations were linearly correlated, indicating yttria-deposition-induced proton incorporation. XPS confirmed an appreciable amount of Y(OH)3 proportional to the 2H+ content in the ALD YSZ, as was also detected by SIMS. Oxide ion vacancies created by the replacement of ZrO2 with relatively small amounts of Y2O3 provided additional vacancies for proton incorporation, resulting in steeper [2H+]/[Y3+] slopes.

KW - Atomic layer deposition

KW - Protons

KW - Secondary ion mass spectrometry

KW - Yttria-stabilized zirconia

UR - http://www.scopus.com/inward/record.url?scp=84895062541&partnerID=8YFLogxK

U2 - 10.1016/j.ijhydene.2013.11.023

DO - 10.1016/j.ijhydene.2013.11.023

M3 - Article

AN - SCOPUS:84895062541

SN - 0360-3199

VL - 39

SP - 2621

EP - 2627

JO - International Journal of Hydrogen Energy

JF - International Journal of Hydrogen Energy

IS - 6

ER -

Proton incorporation in yttria-stabilized zirconia during atomic layer deposition

Abstract

Keywords

ASJC Scopus subject areas

UN SDGs

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