Proton incorporation in yttria-stabilized zirconia during atomic layer deposition

Kiho Bae, Kyung Sik Son, Jun Woo Kim, Suk Won Park, Jihwan An, Fritz B. Prinz, Joon Hyung Shim

Research output: Contribution to journalArticlepeer-review

10 Citations (Scopus)


This work elucidated the proton-incorporation mechanism in ALD YSZ 1. Isotope 2H2O was used as an oxidant to trace proton incorporation. The ratio of ZrO2 to Y2O 3 ALD cycles was varied from 1:1 to 5:1. TEM confirmed that the ALD YSZ films grew as fully crystallized columnar grains in the cubic ZrO 2 phase. SIMS indicated that the Y3+ and 2H+ concentrations were linearly correlated, indicating yttria-deposition-induced proton incorporation. XPS confirmed an appreciable amount of Y(OH)3 proportional to the 2H+ content in the ALD YSZ, as was also detected by SIMS. Oxide ion vacancies created by the replacement of ZrO2 with relatively small amounts of Y2O3 provided additional vacancies for proton incorporation, resulting in steeper [2H+]/[Y3+] slopes.

Original languageEnglish
Pages (from-to)2621-2627
Number of pages7
JournalInternational Journal of Hydrogen Energy
Issue number6
Publication statusPublished - 2014 Feb 14


  • Atomic layer deposition
  • Protons
  • Secondary ion mass spectrometry
  • Yttria-stabilized zirconia

ASJC Scopus subject areas

  • Renewable Energy, Sustainability and the Environment
  • Fuel Technology
  • Condensed Matter Physics
  • Energy Engineering and Power Technology


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