Qualitative Interpretation of Etch Profile Nonuniformity Using a Wavelet and a Neural Network

Hak Sung Lee, Byungwhan Kim, Serk Rim Choi, Wan Shick Hong, Kyeong Kyun Lee, Won Sun Choi, Myo Taeg Lim

Research output: Contribution to journalArticle

5 Citations (Scopus)

Abstract

A method to predict plasma etch profile nonuniformity is presented. This was accomplished by using a neural network and a wavelet. The wavelet was used to define a metric of the profile nonuniformity. The method was applied to the etching of tungsten films in a helicon SF 6 plasma. The etch process was characterized by a 2 4-1 fractional factorial experiment. The process parameters that were varied in the design include the radio-frequency source power, the bias power, the substrate temperature, and the SF 6 flow rate. The fluorine concentration [F] measured using optical emission spectroscopy was related to the profile nonuniformity. The model prediction accuracy was optimized as a function of training factors, and the optimized model had a root-mean squared error of 6.43 %. Using the optimized model, we qualitatively estimated etch mechanisms. Decreasing each process parameter generally reduced the profile nonuniformity. For variations either in the source power or temperature, both the profile nonuniformity and [F] were highly correlated. The presented method can be applied to characterize any plasma-processed surfaces.

Original languageEnglish
Pages (from-to)817-821
Number of pages5
JournalJournal of the Korean Physical Society
Volume43
Issue number5 II
Publication statusPublished - 2003 Nov 1

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nonuniformity
profiles
optical emission spectroscopy
fluorine
radio frequencies
tungsten
education
flow velocity
etching
temperature
predictions

Keywords

  • Neural network
  • Plasma etching
  • Profile uniformity
  • Wavelet

ASJC Scopus subject areas

  • Physics and Astronomy(all)

Cite this

Lee, H. S., Kim, B., Choi, S. R., Hong, W. S., Lee, K. K., Choi, W. S., & Lim, M. T. (2003). Qualitative Interpretation of Etch Profile Nonuniformity Using a Wavelet and a Neural Network. Journal of the Korean Physical Society, 43(5 II), 817-821.

Qualitative Interpretation of Etch Profile Nonuniformity Using a Wavelet and a Neural Network. / Lee, Hak Sung; Kim, Byungwhan; Choi, Serk Rim; Hong, Wan Shick; Lee, Kyeong Kyun; Choi, Won Sun; Lim, Myo Taeg.

In: Journal of the Korean Physical Society, Vol. 43, No. 5 II, 01.11.2003, p. 817-821.

Research output: Contribution to journalArticle

Lee, HS, Kim, B, Choi, SR, Hong, WS, Lee, KK, Choi, WS & Lim, MT 2003, 'Qualitative Interpretation of Etch Profile Nonuniformity Using a Wavelet and a Neural Network', Journal of the Korean Physical Society, vol. 43, no. 5 II, pp. 817-821.
Lee HS, Kim B, Choi SR, Hong WS, Lee KK, Choi WS et al. Qualitative Interpretation of Etch Profile Nonuniformity Using a Wavelet and a Neural Network. Journal of the Korean Physical Society. 2003 Nov 1;43(5 II):817-821.
Lee, Hak Sung ; Kim, Byungwhan ; Choi, Serk Rim ; Hong, Wan Shick ; Lee, Kyeong Kyun ; Choi, Won Sun ; Lim, Myo Taeg. / Qualitative Interpretation of Etch Profile Nonuniformity Using a Wavelet and a Neural Network. In: Journal of the Korean Physical Society. 2003 ; Vol. 43, No. 5 II. pp. 817-821.
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