Qualitative Interpretation of Etch Profile Nonuniformity Using a Wavelet and a Neural Network

Hak Sung Lee, Byungwhan Kim, Serk Rim Choi, Wan Shick Hong, Kyeong Kyun Lee, Won Sun Choi, Myo Taeg Lim

Research output: Contribution to journalArticlepeer-review

5 Citations (Scopus)

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Physics & Astronomy