Quality factor measurement of micro gyroscope structure according to vacuum level and desired Q-factor range package method

Jong Seok Kim, Sang Woo Lee, Kyu Dong Jung, Woon Bae Kim, Sung Hoon Choa, Byeong Kwon Ju

Research output: Contribution to journalArticle

9 Citations (Scopus)

Abstract

A micro-machined gyro chip of gyroscope is normally packaged in specific vacuum level to get the specific quality factor(Q-factor). If the Q-factor is too high, frequency tuning and the approximate matching between driving and sensing comb structure become difficult, and if the Q-factor is too low, its sensitivity decreases. The optimum Q-factor of our gyro chip design is 4000 range. To get this range, we measured the drive mode Q-factor as vacuum level of our gyro chip and we found that the vacuum level of the desired Q-factor 4000 is in the range of 740 mTorr. Based on this data, we fabricate the wafer level package gyro chip of the desired Q-factor by controlled the basic pressure of package bonding chamber just prior to the bonding process. After wafer level package process, we measured Q-factor of whole samples. Among 804 samples, 502 packaged gyro chips are worked and the Q-factor of 67% samples is between 3500 and 4500 range.

Original languageEnglish
Pages (from-to)948-952
Number of pages5
JournalMicroelectronics Reliability
Volume48
Issue number6
DOIs
Publication statusPublished - 2008 Jun 1

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Gyroscopes
gyroscopes
Q factors
Vacuum
vacuum
chips
Tuning
wafers
chambers
tuning
sensitivity

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Electrical and Electronic Engineering

Cite this

Quality factor measurement of micro gyroscope structure according to vacuum level and desired Q-factor range package method. / Kim, Jong Seok; Lee, Sang Woo; Jung, Kyu Dong; Kim, Woon Bae; Choa, Sung Hoon; Ju, Byeong Kwon.

In: Microelectronics Reliability, Vol. 48, No. 6, 01.06.2008, p. 948-952.

Research output: Contribution to journalArticle

Kim, Jong Seok ; Lee, Sang Woo ; Jung, Kyu Dong ; Kim, Woon Bae ; Choa, Sung Hoon ; Ju, Byeong Kwon. / Quality factor measurement of micro gyroscope structure according to vacuum level and desired Q-factor range package method. In: Microelectronics Reliability. 2008 ; Vol. 48, No. 6. pp. 948-952.
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