Quantitative measurement with scanning thermal microscope by preventing the distortion due to the heat transfer through the air

Kyeongtae Kim, Jaehun Chung, Gwangseok Hwang, Oh Myoung Kwon, Joon Sik Lee

Research output: Contribution to journalArticle

72 Citations (Scopus)

Abstract

Because of its high spatial resolution, scanning thermal microscopy (SThM) has been developed quite actively and applied in such diverse areas as microelectronics, optoelectronics, polymers, and carbon nanotubes for more than a decade since the 1990s. However, despite its long history and diverse areas of application, surprisingly, no quantitative profiling method has been established yet. This is mostly due to the nonlocal nature of measurement by conventional SThM: the signal measured by SThM is induced not only from the local heat flux through the tip-sample thermal contact but also (and mostly) from the heat flux through the air gap between the sample and the SThM probe. In this study, a rigorous but simple and practical theory for quantitative SThM for local measurement is established and verified experimentally using high-performance SThM probes. The development of quantitative SThM will make possible new breakthroughs in diverse fields of nanothermal science and engineering.

Original languageEnglish
Pages (from-to)8700-8709
Number of pages10
JournalACS Nano
Volume5
Issue number11
DOIs
Publication statusPublished - 2011 Nov 22

Fingerprint

Microscopes
heat transfer
microscopes
Microscopic examination
Heat transfer
microscopy
Scanning
scanning
air
Air
nanotubes
heat flux
Heat flux
probes
Carbon Nanotubes
Hot Temperature
microelectronics
electric contacts
Microelectronics
Optoelectronic devices

Keywords

  • quantitative profiling
  • scanning thermal microscopy
  • temperature
  • thermal conductivity
  • thermocouple probe

ASJC Scopus subject areas

  • Engineering(all)
  • Materials Science(all)
  • Physics and Astronomy(all)

Cite this

Quantitative measurement with scanning thermal microscope by preventing the distortion due to the heat transfer through the air. / Kim, Kyeongtae; Chung, Jaehun; Hwang, Gwangseok; Kwon, Oh Myoung; Lee, Joon Sik.

In: ACS Nano, Vol. 5, No. 11, 22.11.2011, p. 8700-8709.

Research output: Contribution to journalArticle

Kim, Kyeongtae ; Chung, Jaehun ; Hwang, Gwangseok ; Kwon, Oh Myoung ; Lee, Joon Sik. / Quantitative measurement with scanning thermal microscope by preventing the distortion due to the heat transfer through the air. In: ACS Nano. 2011 ; Vol. 5, No. 11. pp. 8700-8709.
@article{fce377c425b445aca250c78a08dc554c,
title = "Quantitative measurement with scanning thermal microscope by preventing the distortion due to the heat transfer through the air",
abstract = "Because of its high spatial resolution, scanning thermal microscopy (SThM) has been developed quite actively and applied in such diverse areas as microelectronics, optoelectronics, polymers, and carbon nanotubes for more than a decade since the 1990s. However, despite its long history and diverse areas of application, surprisingly, no quantitative profiling method has been established yet. This is mostly due to the nonlocal nature of measurement by conventional SThM: the signal measured by SThM is induced not only from the local heat flux through the tip-sample thermal contact but also (and mostly) from the heat flux through the air gap between the sample and the SThM probe. In this study, a rigorous but simple and practical theory for quantitative SThM for local measurement is established and verified experimentally using high-performance SThM probes. The development of quantitative SThM will make possible new breakthroughs in diverse fields of nanothermal science and engineering.",
keywords = "quantitative profiling, scanning thermal microscopy, temperature, thermal conductivity, thermocouple probe",
author = "Kyeongtae Kim and Jaehun Chung and Gwangseok Hwang and Kwon, {Oh Myoung} and Lee, {Joon Sik}",
year = "2011",
month = "11",
day = "22",
doi = "10.1021/nn2026325",
language = "English",
volume = "5",
pages = "8700--8709",
journal = "ACS Nano",
issn = "1936-0851",
publisher = "American Chemical Society",
number = "11",

}

TY - JOUR

T1 - Quantitative measurement with scanning thermal microscope by preventing the distortion due to the heat transfer through the air

AU - Kim, Kyeongtae

AU - Chung, Jaehun

AU - Hwang, Gwangseok

AU - Kwon, Oh Myoung

AU - Lee, Joon Sik

PY - 2011/11/22

Y1 - 2011/11/22

N2 - Because of its high spatial resolution, scanning thermal microscopy (SThM) has been developed quite actively and applied in such diverse areas as microelectronics, optoelectronics, polymers, and carbon nanotubes for more than a decade since the 1990s. However, despite its long history and diverse areas of application, surprisingly, no quantitative profiling method has been established yet. This is mostly due to the nonlocal nature of measurement by conventional SThM: the signal measured by SThM is induced not only from the local heat flux through the tip-sample thermal contact but also (and mostly) from the heat flux through the air gap between the sample and the SThM probe. In this study, a rigorous but simple and practical theory for quantitative SThM for local measurement is established and verified experimentally using high-performance SThM probes. The development of quantitative SThM will make possible new breakthroughs in diverse fields of nanothermal science and engineering.

AB - Because of its high spatial resolution, scanning thermal microscopy (SThM) has been developed quite actively and applied in such diverse areas as microelectronics, optoelectronics, polymers, and carbon nanotubes for more than a decade since the 1990s. However, despite its long history and diverse areas of application, surprisingly, no quantitative profiling method has been established yet. This is mostly due to the nonlocal nature of measurement by conventional SThM: the signal measured by SThM is induced not only from the local heat flux through the tip-sample thermal contact but also (and mostly) from the heat flux through the air gap between the sample and the SThM probe. In this study, a rigorous but simple and practical theory for quantitative SThM for local measurement is established and verified experimentally using high-performance SThM probes. The development of quantitative SThM will make possible new breakthroughs in diverse fields of nanothermal science and engineering.

KW - quantitative profiling

KW - scanning thermal microscopy

KW - temperature

KW - thermal conductivity

KW - thermocouple probe

UR - http://www.scopus.com/inward/record.url?scp=81855177547&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=81855177547&partnerID=8YFLogxK

U2 - 10.1021/nn2026325

DO - 10.1021/nn2026325

M3 - Article

C2 - 21999681

AN - SCOPUS:81855177547

VL - 5

SP - 8700

EP - 8709

JO - ACS Nano

JF - ACS Nano

SN - 1936-0851

IS - 11

ER -