Quantum confinement effect of silicon nanocrystals in situ grown in silicon nitride films

Tae Youb Kim, Nae Man Park, Kyung Hyun Kim, Young Woo Ok, Tae Yeon Seong, Cheol Jong Choi, Gun Yong Sung

Research output: Contribution to journalConference articlepeer-review

2 Citations (Scopus)


Silicon nanocrystals were in situ grown in a silicon nitride film by plasma enhanced chemical vapor deposition. The size and structure of silicon nanocrystals were confirmed by high-resolution transmission electron microscopy. Depending on the size, the photoluminescence of silicon nanocrystals can be tuned from the near infrared (1.38 eV) to the ultraviolet (3.02 eV). The fitted photoluminescence peak energy as E(eV) = 1.16 + 11.8/d2 is an evidence for the quantum confinement effect in silicon nanocrystals. The results demonstrate that the band gap of silicon nanocrystals embedded in silicon nitride matrix was more effectively controlled for a wide range of luminescent wavelengths.

Original languageEnglish
Pages (from-to)121-126
Number of pages6
JournalMaterials Research Society Symposium - Proceedings
Publication statusPublished - 2004
Externally publishedYes
EventNew Materials for Microphotonics - San Francisco, CA, United States
Duration: 2004 Apr 132004 Apr 15

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering


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