Real-time microlithography employing a transparent liquid crystal display (LCD) panel as a configurable mask

Sung Hoon Pieh, Byoung Ho Park, Yu Jin Jang, Kang Hyun Kim, Gyu-Tae Kim

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We describe a simple concept of an in situ photolithographic technique by using a liquid crystal display panel as a configurable mask and a CCD (charge coupled device) camera as a simple imaging system. The successive operation of imaging and configurable masking enabled a real-time projection lithography process by the selective exposure of light through the LCD (liquid crystal display) panel. A correction of a defect pattern could be also demonstrated by optimizing the exposure conditions and aligning the mismatches between imaging and the corresponding lithographic patterning.

Original languageEnglish
Title of host publicationProceedings of SPIE - The International Society for Optical Engineering
EditorsB.W. Smith
Pages1040-1046
Number of pages7
Volume5377
EditionPART 2
DOIs
Publication statusPublished - 2004
EventOptical Microlithography XVII - Santa Clara, CA, United States
Duration: 2004 Jan 242004 Jan 27

Other

OtherOptical Microlithography XVII
CountryUnited States
CitySanta Clara, CA
Period04/1/2404/1/27

Fingerprint

Liquid crystal displays
Lithography
Masks
masks
liquid crystals
Imaging techniques
CCD cameras
masking
Imaging systems
charge coupled devices
lithography
projection
cameras
Defects
defects

Keywords

  • Configurable mask
  • Exposure system
  • Imaging system
  • In situ photolithography
  • LCD (liquid crystal display) panel
  • Microlithography
  • Real-time lithography
  • Selective exposure
  • Stereo-typed microscope

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Condensed Matter Physics

Cite this

Pieh, S. H., Park, B. H., Jang, Y. J., Kim, K. H., & Kim, G-T. (2004). Real-time microlithography employing a transparent liquid crystal display (LCD) panel as a configurable mask. In B. W. Smith (Ed.), Proceedings of SPIE - The International Society for Optical Engineering (PART 2 ed., Vol. 5377, pp. 1040-1046) https://doi.org/10.1117/12.534501

Real-time microlithography employing a transparent liquid crystal display (LCD) panel as a configurable mask. / Pieh, Sung Hoon; Park, Byoung Ho; Jang, Yu Jin; Kim, Kang Hyun; Kim, Gyu-Tae.

Proceedings of SPIE - The International Society for Optical Engineering. ed. / B.W. Smith. Vol. 5377 PART 2. ed. 2004. p. 1040-1046.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Pieh, SH, Park, BH, Jang, YJ, Kim, KH & Kim, G-T 2004, Real-time microlithography employing a transparent liquid crystal display (LCD) panel as a configurable mask. in BW Smith (ed.), Proceedings of SPIE - The International Society for Optical Engineering. PART 2 edn, vol. 5377, pp. 1040-1046, Optical Microlithography XVII, Santa Clara, CA, United States, 04/1/24. https://doi.org/10.1117/12.534501
Pieh SH, Park BH, Jang YJ, Kim KH, Kim G-T. Real-time microlithography employing a transparent liquid crystal display (LCD) panel as a configurable mask. In Smith BW, editor, Proceedings of SPIE - The International Society for Optical Engineering. PART 2 ed. Vol. 5377. 2004. p. 1040-1046 https://doi.org/10.1117/12.534501
Pieh, Sung Hoon ; Park, Byoung Ho ; Jang, Yu Jin ; Kim, Kang Hyun ; Kim, Gyu-Tae. / Real-time microlithography employing a transparent liquid crystal display (LCD) panel as a configurable mask. Proceedings of SPIE - The International Society for Optical Engineering. editor / B.W. Smith. Vol. 5377 PART 2. ed. 2004. pp. 1040-1046
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