Recovery of dry etch-induced damage of nano-patterned GaN-based light-emitting diodes by rapid-thermal-annealing

Hyun Gi Hong, S. S. Kim, D. Y. Kim, Takhee Lee, Kyoung Kook Kim, June O. Song, J. H. Cho, Tae Yeon Seong

Research output: Contribution to journalArticle

11 Citations (Scopus)

Abstract

The effect of rapid-thermal-annealing on the performance of near-UV GaN-based light-emitting diodes (LEDs) fabricated with nano-patterned p-type electrodes has been investigated. One-dimensional (1-D) nano-patterns were formed on Cu-doped indium oxide (CIO)/indium tin oxide (ITO) p-electrode by surface relief grating and dry etching techniques. After the nano-patterning, some of the samples are rapidthermal-annealed at 530 and 630°C in either air or nitrogen ambient. LEDs made with samples annealed 530°C show much better electrical characteristics as compared to unannealed samples. In particular, LEDs with samples annealed 530°C in air show higher output power (at 20 mA) and much reduced leakage current as compared to LEDs with unannealed samples.

Original languageEnglish
Pages (from-to)881-886
Number of pages6
JournalPhysica Status Solidi (A) Applications and Materials Science
Volume204
Issue number3
DOIs
Publication statusPublished - 2007 Mar 1

Fingerprint

Rapid thermal annealing
Light emitting diodes
light emitting diodes
recovery
damage
Recovery
annealing
Indium
indium oxides
Electrodes
Dry etching
Air
Tin oxides
Leakage currents
electrodes
air
Nitrogen
tin oxides
leakage
Oxides

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Surfaces, Coatings and Films

Cite this

Recovery of dry etch-induced damage of nano-patterned GaN-based light-emitting diodes by rapid-thermal-annealing. / Hong, Hyun Gi; Kim, S. S.; Kim, D. Y.; Lee, Takhee; Kim, Kyoung Kook; Song, June O.; Cho, J. H.; Seong, Tae Yeon.

In: Physica Status Solidi (A) Applications and Materials Science, Vol. 204, No. 3, 01.03.2007, p. 881-886.

Research output: Contribution to journalArticle

Hong, Hyun Gi ; Kim, S. S. ; Kim, D. Y. ; Lee, Takhee ; Kim, Kyoung Kook ; Song, June O. ; Cho, J. H. ; Seong, Tae Yeon. / Recovery of dry etch-induced damage of nano-patterned GaN-based light-emitting diodes by rapid-thermal-annealing. In: Physica Status Solidi (A) Applications and Materials Science. 2007 ; Vol. 204, No. 3. pp. 881-886.
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