Reliability and stability analysis and crack estimation of semiconductor gas sensors heater

Jiseong Lee, Yong Sin Kim

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

In this paper, thermal stability and reliability of a semiconductor gas sensor based on alumina substrates are analyzed by applying certain voltage of a heater inside the gas sensor. The heater normal operating voltage and temperature are 4.612V and 350 degrees Celsius respectively. The stability is measured while maintaining 4.612V and 4.629V for 830 hours. To measure the degree of a crack in the heater, a temperature acceleration experiment is performed for 7 days by applying a voltage of 4.94V or higher, and the value at high temperature is measured and compared. Initially, the certain resistance of the heater is 53 ohms. As a higher voltage is applied, the temperature increases. As a result, the resistance gradually changes. When the sensor reaches the limit point, the resistance decreases and saturation occurs at 40 ohms. The stability experiment results confirm that the inaccuracy increases above 375 degrees Celsius. Through the temperature acceleration experiments, the degree of the crack is measured to the point where the resistance change is 5%. As a result, the degree of damage at different temperature is estimated.

Original languageEnglish
Title of host publication2021 International Conference on Electronics, Information, and Communication, ICEIC 2021
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)9781728191614
DOIs
Publication statusPublished - 2021 Jan 31
Event2021 International Conference on Electronics, Information, and Communication, ICEIC 2021 - Jeju, Korea, Republic of
Duration: 2021 Jan 312021 Feb 3

Publication series

Name2021 International Conference on Electronics, Information, and Communication, ICEIC 2021

Conference

Conference2021 International Conference on Electronics, Information, and Communication, ICEIC 2021
Country/TerritoryKorea, Republic of
CityJeju
Period21/1/3121/2/3

Keywords

  • Crack estimation
  • Gas sensor
  • Reliability
  • Stability
  • Tempeature

ASJC Scopus subject areas

  • Artificial Intelligence
  • Computer Networks and Communications
  • Information Systems
  • Information Systems and Management
  • Electrical and Electronic Engineering
  • Instrumentation

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