Reliability assessment of MEMS structure of Su-8 thin film

Jun Hyub Park, Hak Joo Lee, Joong Hyok An, Hee Yuel Roh, Yun Jae Kim, Sang Hyun Kim

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This paper describes new test method for obtaining static and dynamic characteristics of thin film and reliability evaluation method on MEMS device with thin film. The Su-8 is often used in micro-electro-mechanical systems devices. Durability should be ensured for such devices under cycling load. Therefore, with the proposed specimen and test procedure, tensile test was performed to obtain mechanical properties. The specimen was made with dimensions of 1000μm long, 9 and 11μm thickness, and 3 kinds of width, 50, 100 and 150μm. Behaviors of Su-8 have the 3 kinds of stress-strain curves. The mechanical characteristics of Su-8 were multiple, showing characteristics of brittle and ductile material and polymer. It was found that the mechanical properties of Su-8 did not have any effect on thickness. High cycle fatigue test was performed to obtain probability of failure at a given stress. We found that fatigue life of Su-8 was very susceptible to stress level and then strength-stress model was suitable for the assessment of durability of MEMS structure under cycling load.

Original languageEnglish
Title of host publicationProceedings of the International Conference on Integration and Commercialization of Micro and Nanosystems 2007
Pages495-500
Number of pages6
DOIs
Publication statusPublished - 2007
EventInternational Conference on Integration and Commercialization of Micro and Nanosystems 2007 - Sanya, Hainan, China
Duration: 2007 Jan 102007 Jan 13

Publication series

NameProceedings of the International Conference on Integration and Commercialization of Micro and Nanosystems 2007
VolumeA

Other

OtherInternational Conference on Integration and Commercialization of Micro and Nanosystems 2007
CountryChina
CitySanya, Hainan
Period07/1/1007/1/13

ASJC Scopus subject areas

  • Hardware and Architecture
  • Electrical and Electronic Engineering

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  • Cite this

    Park, J. H., Lee, H. J., An, J. H., Roh, H. Y., Kim, Y. J., & Kim, S. H. (2007). Reliability assessment of MEMS structure of Su-8 thin film. In Proceedings of the International Conference on Integration and Commercialization of Micro and Nanosystems 2007 (pp. 495-500). (Proceedings of the International Conference on Integration and Commercialization of Micro and Nanosystems 2007; Vol. A). https://doi.org/10.1115/MNC2007-21306