Residual strain measurement of piezoelectric multilayers by spiral structure

Jun Hyub Park, Young Ryun Oh, Hyun Suk Nam, Yun-Jae Kim, Tae Hyun Kim, Hee Yeoun Kim

Research output: Contribution to journalArticle

2 Citations (Scopus)

Abstract

A new structure is described to measure the residual strain of thin film of piezoelectric multi-layers. The spiral shaped structure consists of the four fixed-guided beams. Piezoelectric multilayers consisting of SiOx/Pt/PZT/Pt on SiNx substrate are used to evaluate the suggested structure. Finite element analysis predicts that the out-of-plane displacement of the spiral structure by residual stress depends linearly on the beam length, but there is little difference depending on the beam width. PZT is prepared by sol-gel method and multilayered spiral structures are released by microfabrication technique. Sensitivity analysis of the spiral structure with various layer stack shows that the high displacement of piezoelectric multilayers can be decreased by the application of SiOx layer with compressive stress over the piezoelectric multilayers.

Original languageEnglish
Pages (from-to)2139-2142
Number of pages4
JournalJournal of Mechanical Science and Technology
Volume26
Issue number7
DOIs
Publication statusPublished - 2012 Jul 1

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Strain measurement
Multilayers
Microfabrication
Compressive stress
Sol-gel process
Sensitivity analysis
Residual stresses
Finite element method
Thin films
Substrates

Keywords

  • Multilayers
  • Piezoelectric
  • Residual strain
  • Spiral beam

ASJC Scopus subject areas

  • Mechanical Engineering
  • Mechanics of Materials

Cite this

Residual strain measurement of piezoelectric multilayers by spiral structure. / Park, Jun Hyub; Oh, Young Ryun; Nam, Hyun Suk; Kim, Yun-Jae; Kim, Tae Hyun; Kim, Hee Yeoun.

In: Journal of Mechanical Science and Technology, Vol. 26, No. 7, 01.07.2012, p. 2139-2142.

Research output: Contribution to journalArticle

Park, Jun Hyub ; Oh, Young Ryun ; Nam, Hyun Suk ; Kim, Yun-Jae ; Kim, Tae Hyun ; Kim, Hee Yeoun. / Residual strain measurement of piezoelectric multilayers by spiral structure. In: Journal of Mechanical Science and Technology. 2012 ; Vol. 26, No. 7. pp. 2139-2142.
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