Residual stress and elastic modulus of Y₂O₃ coating deposited by EB-PVD and its effects on surface crack formation

Engineering & Materials Science

• Acoustic waves 6%
• Aluminum oxide 8%
• Coatings 56%
• Crack initiation 74%
• Cracks 5%
• Crystalline materials 8%
• Elastic moduli 63%
• Erosion 8%
• Fluorocarbons 12%
• Nanoindentation 10%
• Physical vapor deposition 92%
• Plasmas 7%
• Residual stresses 65%
• Silicon 6%
• Substrates 5%
• Temperature 6%
• Tensile stress 8%
• Thermal cycling 9%
• Thermal expansion 8%
• Toughness 7%

Chemical Compounds

• Amorphous Material 5%
• Coating Agent 45%
• Fluorocarbon 9%
• Plasma 5%
• Residual Stress 100%
• Surface 24%
• Thermal Cycling 10%
• Thermal Expansion Coefficient 9%