Residual stress change by thermal annealing in amorphous Sm-Fe-B thin films

S. M. Na, S. J. Suh, H. J. Kim, S. H. Lim

Research output: Contribution to journalArticle

7 Citations (Scopus)

Abstract

The residual stress change was investigated by thermal annealing in amorphous Sm-Fe-B thin films as a function of annealing temperature. Two stress components of intrinsic compressive stresses and tensile stress due to the difference of thermal expansion coefficient between the substrate and thin films was used to explain the stress state in as-deposited thin films. The annealing temperature dependence of residual stress, mechanical bending and magnetic properties were also investigated.

Original languageEnglish
Pages (from-to)570-572
Number of pages3
JournalJournal of Magnetism and Magnetic Materials
Volume239
Issue number1-3
DOIs
Publication statusPublished - 2002 Feb
Externally publishedYes

Keywords

  • Giant magnetostriction
  • Magnetoelastic anisotropy
  • Residual stress
  • Thermal annealing
  • Thin films

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics

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