Resonance properties and mass sensitivity of monolithic microcantilever sensors actuated by piezoelectric PZT thick film

Jae Hong Park, Tae Yun Kwon, Hyung Joon Kim, Seung Rae Kim, Dae Sung Yoon, Chae Il Cheon, Hwan Kim, Tae Song Kim

Research output: Contribution to journalArticle

16 Citations (Scopus)

Abstract

The PZT thick film cantilever devices fabricated via MEMS process have much attraction because they are appropriate for biological transducer or sensor, resulting from their large actuating force and relatively high sensitivity especially in liquid. By means of resonance behavior, theoretical calculation and experimental verification of the PZT thick film cantilever devices have not been studied before. Accordingly, we focused on the sensitivity analysis and interpretation of the PZT thick film cantilevers in this study. Especially, the investigation for mass sensitivity of the PZT thick film cantilever is of importance for physical, chemical and biological sensing application. The PZT thick film cantilever devices were constructed on Pt/TiO2/SiN X /Si substrates using screen printing method and MEMS process. The harmonic oscillation response (resonance frequency) was measured using an optical laser interferometric vibrometer. The effect of cantilever geometry on the resonance frequency change was investigated. Compared with the theoretical resonant frequency change by mass loading, the experimental resonant frequency change of the PZT micromechanical thick film cantilever shows a variation of less than 2%. Mass sensitivities are estimated to be 30.7, 57.1 and 152.0 pg/Hz for the 400 × 380 μm, 400 × 480 μm and 400 × 580 μm cantilever, respectively.

Original languageEnglish
Pages (from-to)565-572
Number of pages8
JournalJournal of Electroceramics
Volume17
Issue number2-4
DOIs
Publication statusPublished - 2006 Dec 1
Externally publishedYes

Fingerprint

Thick films
thick films
sensors
Sensors
microelectromechanical systems
MEMS
resonant frequencies
Natural frequencies
harmonic oscillation
vibration meters
Screen printing
sensitivity analysis
printing
Sensitivity analysis
attraction
Transducers
transducers
Geometry
Lasers
sensitivity

Keywords

  • Cantilever
  • PZT
  • Resonance
  • Sensitivity
  • Thick film

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Ceramics and Composites
  • Condensed Matter Physics
  • Mechanics of Materials
  • Materials Chemistry
  • Electrical and Electronic Engineering

Cite this

Resonance properties and mass sensitivity of monolithic microcantilever sensors actuated by piezoelectric PZT thick film. / Park, Jae Hong; Kwon, Tae Yun; Kim, Hyung Joon; Kim, Seung Rae; Yoon, Dae Sung; Cheon, Chae Il; Kim, Hwan; Kim, Tae Song.

In: Journal of Electroceramics, Vol. 17, No. 2-4, 01.12.2006, p. 565-572.

Research output: Contribution to journalArticle

Park, Jae Hong ; Kwon, Tae Yun ; Kim, Hyung Joon ; Kim, Seung Rae ; Yoon, Dae Sung ; Cheon, Chae Il ; Kim, Hwan ; Kim, Tae Song. / Resonance properties and mass sensitivity of monolithic microcantilever sensors actuated by piezoelectric PZT thick film. In: Journal of Electroceramics. 2006 ; Vol. 17, No. 2-4. pp. 565-572.
@article{d6a94adf7bf84e929911aa0d4ca12bae,
title = "Resonance properties and mass sensitivity of monolithic microcantilever sensors actuated by piezoelectric PZT thick film",
abstract = "The PZT thick film cantilever devices fabricated via MEMS process have much attraction because they are appropriate for biological transducer or sensor, resulting from their large actuating force and relatively high sensitivity especially in liquid. By means of resonance behavior, theoretical calculation and experimental verification of the PZT thick film cantilever devices have not been studied before. Accordingly, we focused on the sensitivity analysis and interpretation of the PZT thick film cantilevers in this study. Especially, the investigation for mass sensitivity of the PZT thick film cantilever is of importance for physical, chemical and biological sensing application. The PZT thick film cantilever devices were constructed on Pt/TiO2/SiN X /Si substrates using screen printing method and MEMS process. The harmonic oscillation response (resonance frequency) was measured using an optical laser interferometric vibrometer. The effect of cantilever geometry on the resonance frequency change was investigated. Compared with the theoretical resonant frequency change by mass loading, the experimental resonant frequency change of the PZT micromechanical thick film cantilever shows a variation of less than 2{\%}. Mass sensitivities are estimated to be 30.7, 57.1 and 152.0 pg/Hz for the 400 × 380 μm, 400 × 480 μm and 400 × 580 μm cantilever, respectively.",
keywords = "Cantilever, PZT, Resonance, Sensitivity, Thick film",
author = "Park, {Jae Hong} and Kwon, {Tae Yun} and Kim, {Hyung Joon} and Kim, {Seung Rae} and Yoon, {Dae Sung} and Cheon, {Chae Il} and Hwan Kim and Kim, {Tae Song}",
year = "2006",
month = "12",
day = "1",
doi = "10.1007/s10832-006-6290-8",
language = "English",
volume = "17",
pages = "565--572",
journal = "Journal of Electroceramics",
issn = "1385-3449",
publisher = "Springer Netherlands",
number = "2-4",

}

TY - JOUR

T1 - Resonance properties and mass sensitivity of monolithic microcantilever sensors actuated by piezoelectric PZT thick film

AU - Park, Jae Hong

AU - Kwon, Tae Yun

AU - Kim, Hyung Joon

AU - Kim, Seung Rae

AU - Yoon, Dae Sung

AU - Cheon, Chae Il

AU - Kim, Hwan

AU - Kim, Tae Song

PY - 2006/12/1

Y1 - 2006/12/1

N2 - The PZT thick film cantilever devices fabricated via MEMS process have much attraction because they are appropriate for biological transducer or sensor, resulting from their large actuating force and relatively high sensitivity especially in liquid. By means of resonance behavior, theoretical calculation and experimental verification of the PZT thick film cantilever devices have not been studied before. Accordingly, we focused on the sensitivity analysis and interpretation of the PZT thick film cantilevers in this study. Especially, the investigation for mass sensitivity of the PZT thick film cantilever is of importance for physical, chemical and biological sensing application. The PZT thick film cantilever devices were constructed on Pt/TiO2/SiN X /Si substrates using screen printing method and MEMS process. The harmonic oscillation response (resonance frequency) was measured using an optical laser interferometric vibrometer. The effect of cantilever geometry on the resonance frequency change was investigated. Compared with the theoretical resonant frequency change by mass loading, the experimental resonant frequency change of the PZT micromechanical thick film cantilever shows a variation of less than 2%. Mass sensitivities are estimated to be 30.7, 57.1 and 152.0 pg/Hz for the 400 × 380 μm, 400 × 480 μm and 400 × 580 μm cantilever, respectively.

AB - The PZT thick film cantilever devices fabricated via MEMS process have much attraction because they are appropriate for biological transducer or sensor, resulting from their large actuating force and relatively high sensitivity especially in liquid. By means of resonance behavior, theoretical calculation and experimental verification of the PZT thick film cantilever devices have not been studied before. Accordingly, we focused on the sensitivity analysis and interpretation of the PZT thick film cantilevers in this study. Especially, the investigation for mass sensitivity of the PZT thick film cantilever is of importance for physical, chemical and biological sensing application. The PZT thick film cantilever devices were constructed on Pt/TiO2/SiN X /Si substrates using screen printing method and MEMS process. The harmonic oscillation response (resonance frequency) was measured using an optical laser interferometric vibrometer. The effect of cantilever geometry on the resonance frequency change was investigated. Compared with the theoretical resonant frequency change by mass loading, the experimental resonant frequency change of the PZT micromechanical thick film cantilever shows a variation of less than 2%. Mass sensitivities are estimated to be 30.7, 57.1 and 152.0 pg/Hz for the 400 × 380 μm, 400 × 480 μm and 400 × 580 μm cantilever, respectively.

KW - Cantilever

KW - PZT

KW - Resonance

KW - Sensitivity

KW - Thick film

UR - http://www.scopus.com/inward/record.url?scp=33847252516&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=33847252516&partnerID=8YFLogxK

U2 - 10.1007/s10832-006-6290-8

DO - 10.1007/s10832-006-6290-8

M3 - Article

AN - SCOPUS:33847252516

VL - 17

SP - 565

EP - 572

JO - Journal of Electroceramics

JF - Journal of Electroceramics

SN - 1385-3449

IS - 2-4

ER -